Precision planeness-measuring apparatus for miniature part

Abstract

The invention relates to a precision planeness-measuring apparatus for a miniature part. The apparatus is mainly composed of a pedestal, a column, a two-dimension flexible guiding mechanism, a measured part adjusting assembly, a displacement sensor assembly and a measurement drive assembly. A measured part is fixed by a chuck and placed on a four degrees of freedom adjusting platform, and the measured part and the four degrees of freedom adjusting platform are arranged on the pedestal; and the column fixed on the pedestal supports the guiding mechanism, the displacement sensor is mounted on the guiding mechanism, and a probe contacts the part. A micrometer head drives a steel wire to drive the guiding mechanism to move along the X direction and the Y direction, to make the probe to scan and measure the surface of the part in the X direction and the Y direction, and changes in the height (the Z direction) of the surface of the part can be measured through the displacement sensor and displayed on a display; and the measured data is recorded, and planeness calculation methods such as a least square algorithm can be used for evaluating the planeness of the part. The precision planeness-measuring apparatus for the miniature part is simple in structure, convenient to read, efficient and accurate to obtain a result of measurement of planeness.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, in particular to a device for measuring the flatness of tiny precision parts. Background technique [0002] In the field of domestic machinery manufacturing and machining, it is difficult to measure the flatness of some small parts with high precision, such as dynamic pressure bearings of gyroscopes, small air bearings, gauge blocks, etc. At present, the three-coordinate measuring instrument or flat crystal is basically used for measurement. The accuracy of the three-coordinate measuring instrument cannot meet the accuracy requirements, and when the flatness accuracy of the part is required to be more than 0.5 microns, the flat crystal cannot achieve quantitative measurement of flatness. With the advancement of precision machining technology for tiny parts, the demand for testing tools and testing equipment for tiny parts is becoming more and more urgent. The device designed in th...

AI Technical Summary

Problems solved by technology

The device can perform precise flatness detection on some tiny parts, effectively solving the problem that existing measuring devices cannot meet the precision measurement of flatness of tiny parts

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