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Upwards-protruding needle magnetic fixing mechanism

A fixing mechanism and magnet fixing technology, applied in the manufacture of semiconductor/solid-state devices, electrical components, circuits, etc., can solve the problems of increasing the difficulty of coordination, inability to adjust the horizontal direction, and rising processing costs, reducing processing costs and improving general-purpose performance, the effect of relaxing accuracy requirements

Inactive Publication Date: 2014-03-26
大连佳峰自动化股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Since the volume of the wafer is getting smaller and smaller, the diameter of the protruding pin must be made smaller, and the requirements for the cooperation of each component are higher. However, the protruding pin and the guide cover are not installed on the same part, and they are horizontal It cannot be adjusted, which increases the difficulty of matching, and the processing cost will inevitably rise accordingly

Method used

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  • Upwards-protruding needle magnetic fixing mechanism

Examples

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Effect test

Embodiment Construction

[0012] figure 1 A needle-on-protrusion magnetic fixation mechanism is shown. The magnetic fixing mechanism of the protrusion needle includes the protrusion needle seat 3 and the guide cover 2. The protrusion needle 1 is arranged on the protrusion needle seat 3 and moves up and down in the hole of the guide cover 2; A magnet 4 with weak magnetic force makes the protruding needle 1 move in the horizontal direction. The guide cover 2 is near the top of the protruding needle.

[0013] During work, first install the protruding upper needle 1 on the protruding upper needle holder 3, and the magnet 4 is installed on the magnet holder 5, then raise the magnet holder 5 to the highest point, and put the protruding upper needle holder 3 on the magnet 4 , then install the guide cover 2 and pass through the needle 1, the magnet 4 only limits the displacement of the needle 1 in the vertical direction, within the range of the magnet 4, the needle 1 can be adjusted in any horizontal directi...

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PUM

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Abstract

The invention relates to an upwards-protruding needle magnetic fixing mechanism, and belongs to the technical field of mechanical automation. The fixing mechanism comprises an upwards-protruding needle base and a guiding cover, and an upwards-protruding needle is arranged on the upwards-protruding needle base and vertically moves in a hole of the guiding cover. A magnet with weak magnetic force is installed at the bottom of the upwards-protruding needle base, and the upwards-protruding needle horizontally moves through the magnet. A magnetic fixing mode is adopted in the magnetic fixing mechanism, so that the upwards-protruding needle magnetic fixing mechanism is conveniently assembled and adjusted. The magnet only limits displacement of the upwards-protruding needle in the vertical direction, and the upwards-protruding needle can be adjusted in any horizontal direction within the scope of the magnet. Meanwhile, accuracy requirements for machining related parts are reduced, and therefore the machining cost is reduced. As mechanical limiting is eliminated, the related parts can be generally used, and the universality of the parts is improved.

Description

technical field [0001] The invention relates to a magnetic fixing mechanism for protruding needles, which belongs to the technical field of mechanical automation. Background technique [0002] In the semiconductor die loading equipment, the most important function is to take and stick the wafer. The smooth removal of the wafer from the wafer depends on the cooperation of the protrusion mechanism and the grasping mechanism. [0003] The protruding mechanism is to make the wafer to be taken away on the wafer higher than the wafer and other wafers, and to separate the wafer from the wafer. Only in this way can the grasping mechanism take the wafer away in a vacuum. [0004] The most important part that can complete the above actions is the protruding upper needle. There is a guide cover near the top of the protruding needle, and the protruding needle seat and the guide cover are respectively fixed on different parts, and the protruding needle will move up and down in the hole ...

Claims

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Application Information

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IPC IPC(8): H01L21/687
CPCH01L21/687
Inventor 赵文宝王云峰金元甲
Owner 大连佳峰自动化股份有限公司