Dual-channel space-time mixing phase shifting Fizeau interferometer based on orthogonal polarized light

Abstract

The invention discloses a dual-channel space-time mixing phase shifting Fizeau interferometer based on orthogonal polarized light. The dual-channel space-time mixing phase shifting Fizeau interferometer based on the orthogonal polarized light comprises a light source and light source adjusting unit, a light splitting collimation unit, a signal extraction and time-domain phase shifting unit, an imaging unit, a space-domain phase shifting unit and an image acquisition unit, wherein the light source and a light source adjusting unit comprises a light source, an optical filter, a polarization adjuster and a light beam spread lens and spatial filtering module; the light splitting collimation unit comprises a first unpolarized beam splitting prism and a collimating lens; an imaging objective lens serves as the imaging unit; the space-domain phase shifting unit comprises a 1 / 2 wave plate, a second unpolarized beam splitting prism, an x-direction polaroid and a z-direction polaroid, and dual channels are formed; the image acquisition unit comprises an x-direction CCD and a z-direction CCD; the first unpolarized beam splitting prism is arranged at the position of an intersection between the x direction and the z direction, and the z-direction CCD and the x-direction CCD are arranged on the two channels, and are used for collecting interference fringe graphs, with the phase shifting amount, of objects to be measured. The dual-channel space-time mixing phase shifting Fizeau interferometer based on the orthogonal polarized light has the orthogonal polarization space-domain phase shifting function and the orthogonal polarization time-domain phase shifting function.

Description

technical field [0001] The application of the present invention relates to an optical interferometry instrument, specifically refers to an orthogonal polarization-based instrument that not only uses a wave plate to generate orthogonally polarized light and realizes a simultaneous phase shift in the spatial domain, but also uses a wave plate or piezoelectric ceramic PZT to achieve a time-domain phase shift. Two-channel spatiotemporal hybrid phase-shifting Fizeau interferometer for light. Background technique [0002] Phase Shifting Interferometry Phase Shifting Interferometry, PSI is a sequence of phase-shifting interferometric digital images recorded by a photoelectric image sensor such as a CCD with a monotonous change in the phase shift. After a certain phase-shifting algorithm, the phase distribution of the interference fringe pattern is calculated, and then realized. The high-precision interferometry method for the corresponding physical quantity measurement, the measure...

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Problems solved by technology

However, the Fizeau interferometer also has problems such as inconvenient adjustment of the contrast of interference fringes and insufficient adjustment flexibility.

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