System for measuring infinitesimal displacement

Abstract

Provided is a system for measuring infinitesimal displacement. The system for measuring the infinitesimal displacement comprises a laser, wherein output light of the laser is split into two paths after passing through a first coupler, one path of output light is used for receiving externally-connected displacement signals, the other path of output light passes through piezoelectric ceramics, then the two paths of output light are input into a second coupler together, are coupled in the second coupler, and are split into two beams, the two beams of light are input into a first detector and a second detector respectively, and output of the first detector and output of the second detector are connected with input of a differentiator. According to the system for measuring the infinitesimal displacement, the level of the displacement resolution ratio reaches the nanoscale level on the premise that the requirement of measuring accuracy is met; compared with a laser interferometer, the size is greatly reduced, and convenience is provided for usage in related fields.

Description

[0001] technical field [0002] The invention relates to the technical field of micro-displacement measurement, in particular to a system for measuring micro-displacement. Background technique [0003] In the field of microelectronics and precision instruments, it is often necessary to measure tiny displacements. The measurement level is at the nanometer level. At present, existing displacement sensors can already achieve nanometer-level measurement, such as laser interferometers, which have high resolution and good measurement accuracy. However, the volume is large, and it is not very convenient to use. The fiber optic interferometer is small in size. If it is developed, it can replace the laser interferometer to a large extent, and it is convenient for the agent to use. Contents of the invention [0004] In order to overcome the deficiencies of the above-mentioned prior art, the object of the present invention is to provide a system for measuring small displacements, ...

AI Technical Summary

Problems solved by technology

[0003] In the field of microelectronics and precision instruments, it is often necessary to measure tiny displacements. The measurement level is at the nanometer level. At present, existing displacement sensors can already achieve nanometer-level measurement, such as laser interferometers, which have high resolution and good measurement accuracy. However, the volume is large, and it is not very convenient to use. The fiber optic interferometer is small in size. If it is developed, it can replace the laser interferometer to a large extent, which is convenient for the use of agents.

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