Method for aligning partial compensating lens in aspheric nonzero-digit interference detection

Abstract

The invention discloses a method for aligning a partial compensating lens in aspheric nonzero-digit interference detection. The aligning device is characterized in that fine light beams emitted by a laser are expanded by a collimating beam expanding system to form parallel broad light beams; after parallel light enters a beam splitting plate plated with a semi-reflective semi-transparent film, one part of incident light is reflected, and the reflected light beam is reflected by a plane reference mirror and then returns to the beam splitting plate again; the other part of incident light is transmitted, and the transmitted light beam spreads forwards, enters an auxiliary aligning panel and then returns; the returned reflection light and the returned transmission light meet at the beam splitting plate to generate interference and form an interference pattern; the interference pattern passes through an imaging system and is imaged at a detector; and the inclination of the aligning panel and the partial compensating lens relative to the incident light is adjusted to enable the detector to obtain a zero-fringe interference pattern; and the inclined alignment of the partial compensating lens is realized by moving the aligning panel. According to the method disclosed by the invention, the problem of aligning error of the partial compensating lens in aspheric nonzero-digit interference detection is solved, and the adjustment error of the detection result caused by mistaken alignment is reduced.

Description

[0001] This application is a divisional application of the patent application with the application number 201210054455.2, the application date is March 2, 2012, and the invention name is the partial compensation lens alignment device and method in aspheric non-zero interference detection. technical field [0002] The invention relates to an alignment method of a partially compensated lens in aspherical surface non-zero position interference detection. Background technique [0003] In the aspheric surface non-zero interference detection, the partial compensation lens is responsible for compensating the longitudinal normal aberration of the aspheric surface within a certain range, reducing the slope of the return wavefront at the image plane of the system, and then making the interference fringes distinguishable by the detector. It is the core component of the whole non-zero interference system. In order to reduce the system error, it is required in principle that the partiall...

AI Technical Summary

Problems solved by technology

However, this method requires an additional matching lens group for a specific part of the compensation lens, which will increase the cost of system design, processing, assembly and adjustment, etc.

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