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Invar alloy for large scale integrated circuit manufacturing equipment and preparation method of invar alloy

A technology of large-scale integrated circuits and Invar alloys, which is applied in the field of alloys and their preparation, can solve the problems of not being able to meet the production and use requirements of large-scale integrated circuit manufacturing equipment, complex processing and manufacturing processes, and high cost of alloying elements, so as to maintain comprehensive performance , less alloying elements, cost-saving effect

Active Publication Date: 2014-05-28
SHENYANG FORTUNE PRECISION EQUIP CO LTD
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  • Abstract
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Problems solved by technology

[0010] The invention provides an Invar alloy suitable for large-scale integrated circuit manufacturing equipment and its preparation method to solve the problem that the conventional iron-nickel Invar alloy has low tensile strength and cannot meet the production and use requirements of large-scale integrated circuit manufacturing equipment, and To ensure that when the strength of the alloy is increased, there will be no technical problems such as an obvious increase in the expansion coefficient of the alloy, high cost of adding more expensive alloy elements, complex processing and manufacturing processes, and significant deterioration of the alloy shape

Method used

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  • Invar alloy for large scale integrated circuit manufacturing equipment and preparation method of invar alloy

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specific Embodiment approach 1

[0037] Embodiment 1: In this embodiment, a method for preparing Invar alloy for large-scale integrated circuit manufacturing equipment is carried out according to the following steps: 1. Raw materials are distributed by mass, and the quality of electrolytic nickel accounts for 34.0 to 38.0% of the total mass of raw materials. %, the mass of titanium sponge accounts for 0.01% to 0.5% of the total mass of raw materials, and the balance is electrolytic iron, in which the mass of C element contained in it accounts for 0.001% to 0.1% of the total mass of raw materials; The degree is 0.5×10 -2 ~5×10 -2 Vacuum arc melting Invar alloy under the condition of Pa, the holding time is 5-30min, and the melt is obtained; the temperature is adjusted to 1450-1520°C, and then cast into an ingot; 3. The ingot is heated to 1000-1200°C, and it is processed Pressure processing to obtain products; 4. Heat treatment of the obtained products, heating to 800-900°C for 0.5-3 hours, cooling to room tem...

specific Embodiment approach 2

[0038] Embodiment 2: The only difference between this embodiment and the specific embodiment is that the mass of electrolytic nickel in step 1 accounts for 35.5-36.5% of the total mass of raw materials.

specific Embodiment approach 3

[0039] Embodiment 3: The difference between this embodiment and Embodiment 1 or 2 is that in step 1, the mass of titanium sponge accounts for 0.05% of the total mass of raw materials.

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Abstract

The invention relates to an invar alloy for large scale integrated circuit manufacturing equipment and a preparation method of the invar alloy. The technical scheme adopted by the invention is that an existing conventional Fe-Ni invar alloy comprises Ni, Fe and allowable impurities, wherein the allowable impurities comprise C, the mass fraction of Ni is 34.0%-38.0%, the mass fraction of C is 0.001%-0.1%, and the balance is Fe; the invar alloy for large scale integrated circuit manufacturing equipment is characterized in that Ti is added on the basis of keeping the constituents of the conventional Fe-Ni invar alloy, and the mass fraction of Ti is 0.01%-0.5%; Ti reacts with C to generate a strengthening phase TiC in situ. The invar alloy and the preparation method solve the problems that the conventional Fe-Ni invar alloy is relatively low in tensile strength, and cannot meet the production and use requirements of the large scale integrated circuit manufacturing equipment.

Description

technical field [0001] The invention relates to an alloy and a preparation method thereof, in particular to an Invar alloy and a preparation method thereof, in particular to an Invar alloy for large-scale integrated circuit manufacturing equipment and a preparation method thereof. Background technique [0002] Conventional iron-nickel invar alloy is a metal material containing about 36% nickel by mass, such as 4J36. Below the Curie temperature, the alloy has an extremely low coefficient of expansion. Due to this characteristic of conventional iron-nickel invar alloy, it has become one of the commonly used materials in the manufacture of precision instruments and equipment. In order to ensure the accuracy, stability, and reliability of large-scale integrated circuit product performance, large-scale integrated circuit manufacturing equipment should also be designed and manufactured with dimensionally stable Invar alloy materials. Although the expansion properties of conventi...

Claims

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Application Information

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IPC IPC(8): C22C38/14C22C33/04
Inventor 路东柱吴敏杰郑广文
Owner SHENYANG FORTUNE PRECISION EQUIP CO LTD
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