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Micro cantilever beam deflection scanning system and method for micro cantilever beam array sensor based on multi-angle plane transmitting mirrors

An array sensor and micro-cantilever technology, applied in the field of micro-cantilever deflection scanning system, can solve the problems of particle motion, detection data error, inability to guarantee laser beam consistency, etc., achieve high accuracy, eliminate system errors, and avoid optical paths the effect of interference

Active Publication Date: 2014-06-04
ANHUI UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The problem with this detection method is that the distance between the beams of the vertical resonator surface-emitting laser is fixed, so it can only detect the micro-cantilever beam array with a certain distance specification, and the relative independence of each laser beam cannot guarantee the accuracy of the laser beam. consistency
The movement of the solvent pool will cause unnecessary movement of the particles in the reaction solution, which will cause errors in the detection data

Method used

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  • Micro cantilever beam deflection scanning system and method for micro cantilever beam array sensor based on multi-angle plane transmitting mirrors
  • Micro cantilever beam deflection scanning system and method for micro cantilever beam array sensor based on multi-angle plane transmitting mirrors
  • Micro cantilever beam deflection scanning system and method for micro cantilever beam array sensor based on multi-angle plane transmitting mirrors

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Experimental program
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Effect test

Embodiment 1

[0044] Such as figure 1 As shown, the micro-cantilever deflection scanning system includes:

[0045] A laser 2 for emitting laser beams vertically downward; the laser 2 is set on a movable platform 1 whose initial position can be adjusted; the laser is a semiconductor laser, and the laser light source is a monochromatic light source within the range of 632nm-780nm.

[0046] A line-arranged plane transmission mirror group fixed in front of the horizontal displacement platform 3 sides, the plane transmission mirror group consists of the first plane transmission mirror 41, the second plane transmission mirror 42 ... and the Nth plane transmission mirror 4N from left to right Composition, N is equal to the number M of micro-cantilever beams on the micro-cantilever beam array of the sensor to be tested. The sensor micro-cantilever beam array is composed of the first micro-cantilever beam 51, the second micro-cantilever beam 52 ... and the 5th M micro-cantilever beam from left to ri...

Embodiment 2

[0059] The line-arranged planar transmission lens group fixed on the horizontal displacement platform in Embodiment 1 is replaced by being fixed on the horizontal rotation platform 15, and the array is changed to be arranged in a circle around the rotation axis of the rotation platform, and the horizontal rotation platform is A light-shielding plate with round holes, which are respectively located directly in front of each plane transmission mirror. The size of the round hole allows the laser to irradiate the plane transmission mirror, and the scanning of the microbeam can be realized after passing through the plane transmission mirror; Figure 5a , 5b shown.

Embodiment 3

[0061] The scanning method of the scanning system of embodiment 1 or 2, comprises the steps:

[0062] 1) Place the micro-cantilever array sensor to be tested on the substrate clamping platform in the solvent pool. The substrate clamping platform arranges the micro-cantilever beam array in an oblique direction. The solvent pool is airtight, with a transparent glass window on the top, and the solvent The pool controls the entry and exit of solvents through the inlet pipe and outlet pipe;

[0063] 2) Adjust and fix the initial position of the laser, and at the same time adjust the initial position of the horizontal displacement platform or the horizontal rotation platform, so that the only horizontally set plane transmission mirror in the plane transmission lens group is located directly below the laser, and adjust the initial position of the solvent pool, Make the micro-cantilever in the micro-cantilever array sensor corresponding to the only horizontally arranged plane transmis...

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Abstract

The invention discloses a micro cantilever beam deflection scanning system and a micro cantilever beam deflection scanning method for a micro cantilever beam array sensor based on multi-angle plane transmitting mirrors. The system comprises a laser and a group of plane transmitting mirrors which are linearly arrayed, wherein the number of the plane transmitting mirrors is equal to that of micro cantilever beams on the micro cantilever beam array sensor to be detected; different included angles are formed between all the plane transmitting mirrors and the horizontal plane. According to the micro cantilever beam deflection scanning system, the plane transmitting mirrors with different included angles are driven to form a micro-distance parallel light generation system; laser beams emitted by the laser irradiate the free end of each micro cantilever beam in a micro cantilever beam array through the micro-distance parallel light generation system, and light signals are detected by using a photoelectric position sensitive detector, so that the deflection condition of each micro cantilever beam on the micro cantilever beam array can be detected. According to the system and the method, all the micro cantilever beams can be irradiated by using one laser, system errors caused by detection through different lasers are eliminated, and high-accuracy detection is realized.

Description

technical field [0001] The invention belongs to the field of micro-beam detection, in particular to a micro-cantilever deflection scanning system and a scanning method of a micro-cantilever beam array sensor based on a multi-angle plane transmission mirror. Background technique [0002] The rapid development of modern science and technology such as measurement, control and automation has greatly promoted the progress of information technology, and human society has entered the information age. As one of the three pillars of information technology and the main means of information acquisition, sensor technology plays an increasingly important role in the development of modern science and technology. Biochemical sensors are an important part of modern sensing technology. It is widely used in scientific research, food safety, medical and health, environmental monitoring, industrial and agricultural production, etc. Biochemical sensors are highly specific, powerful and inexpen...

Claims

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Application Information

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IPC IPC(8): G01N21/00G01Q10/00
Inventor 薛长国程韦滕艳华夏玲燕陈兆权胡业林
Owner ANHUI UNIV OF SCI & TECH
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