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Electrostatic fixture

A technology of electrostatic fixtures and electrodes, applied in the field of electrostatic fixtures, can solve problems such as inappropriate cooling rates of substrates

Active Publication Date: 2017-11-21
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Also, in some electrostatic chucks with grooves, the cooling rate at the center and edge of the substrate may not be adequate

Method used

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  • Electrostatic fixture
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Embodiment Construction

[0014] Embodiments of electrostatic clamps are provided herein. The apparatus of the invention may, for example, be provided by an electrostatic clamp to an area of ​​a substrate disposed on said electrostatic clamp by limiting the arc discharge between elements of the substrate support and the plasma and / or by controllably adjusting the The amount of clamping power advantageously provides improved substrate handling. Additionally, the electrostatic clamp may be mounted such that the electrostatic clamp may be removable and / or replaceable. In some embodiments, the substrate support can be used at cryogenic temperatures, eg, temperatures ranging from about -40 to about 250 degrees Celsius. In some embodiments, a substrate support can be used with substrates having a diameter greater than about 400 millimeters. Other and further advantages are discussed below.

[0015] figure 1 A schematic side view of a substrate support 100 according to some embodiments of the invention is...

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Abstract

This article provides an embodiment of static fixture.In some embodiments, the electrostatic fixture used for fixed substrates includes: bottom plate; ceramic plate, ceramic board supported by the bottom plate, and ceramic plate has the substrate support surface; multiple first electrodes, multiple first electrodes are set on the numberIn the ceramic board, multiple first electrodes have the first polarity; and multiple second electrodes, which are set in the ceramic board, the multiple second electrodes are as the first polarity with the first polarityOn the contrary, the second polarity, multiple first electrodes and multiple second electrodes are independent and controllable to provide the expected holding power and frequency.

Description

technical field [0001] Embodiments of the invention generally relate to electrostatic chucks for supporting substrates. Background technique [0002] Electrostatic clamps may be used to secure substrates to a substrate support that are to be processed. Components of the electrostatic chuck may include electrodes and grooves, the electrodes hold the substrate, and the grooves are disposed in the surface of the electrostatic chuck to provide back side gas to the backside surface of the substrate. [0003] A typical electrostatic gripper may include electrodes that provide strong chucking force, but do not provide control for partial chucking when unchucked. In addition, these electrodes can produce uneven clamping force from one end to the other. Furthermore, in some electrostatic chucks with grooves, the cooling rate at the center and edge of the substrate may not be adequate. Additionally, arcing can be seen in the gas trenches beneath the substrate. These elements of th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/683H02N13/00B23Q3/15
CPCH01L21/6833H02N13/00
Inventor 维贾伊·D·帕克赫史蒂芬·V·桑索尼振雄·马修·蔡
Owner APPLIED MATERIALS INC