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Structure for preventing occurrence of resonance in reliability test

A technology for reliability and testing devices, which is applied in the direction of single semiconductor device testing, components of electrical measuring instruments, measuring electricity, etc., can solve problems such as unavoidable resonance, and achieve the effect of saving test resources and saving test time

Inactive Publication Date: 2014-06-25
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But the patent still cannot avoid the occurrence of resonance

Method used

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  • Structure for preventing occurrence of resonance in reliability test
  • Structure for preventing occurrence of resonance in reliability test

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Embodiment Construction

[0017] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. Obviously, the described examples are only some examples of the present invention, not all examples. Based on the examples summarized in the present invention, all examples obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0018] It should be noted that, in the case of no conflict, the examples in the present invention and the features in the examples can be freely combined with each other.

[0019] like figure 1 As shown in , the present invention is a structure for preventing resonance during reliability testing, including a test machine, a test device 1 and an external capacitor 2 .

[0020] In the embodiment of the present invention, an external capacitor 2 is connected in parallel between the drain of the test device 1 and the substrate terminal to ach...

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Abstract

The invention provides a structure for preventing occurrence of resonance in a reliability test and relates to the field of semiconductor test technologies. The structure for preventing occurrence of resonance in the reliability test comprises a testing machine table, a testing device and an additional capacitor. The testing device and the additional capacitor are arranged on the testing machine table, the testing device is provided with a drain electrode and a substrate, the additional capacitor is connected between the drain electrode and the substrate of the testing device in parallel, and the additional frequency of the testing device and the additional capacitor which are connected in parallel is not equal to the inherent frequency of the testing machine table. Through the technical scheme, the problem that because resonance occurs in a packaging level reliability test, a test cannot be normally carried out is effectively solved, and not only are test resources saved, but also test time is saved.

Description

technical field [0001] The invention relates to the field of semiconductor testing technology, in particular to a structure for preventing resonance during reliability testing. Background technique [0002] Before the package-level reliability test, the existing process will do a quick check before the test (Quick check) to confirm whether the initial parameters are normal. If resonance occurs, Infinity (a package-level reliability test system) ) The Quickcheck results will drift, and the Id and Ig values ​​will increase to varying degrees, which are inconsistent with the actual values, so that the test cannot be performed normally. [0003] Resonance is the phenomenon in which the applied frequency is the same or close to the natural frequency to produce the maximum amplitude. The condition for resonance is that when the capacitive reactance of the capacitor is equal to the inductive reactance of the equipment inductance at 50Hz, resonance occurs. During resonance, the vo...

Claims

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Application Information

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IPC IPC(8): G01R1/02G01R31/26
Inventor 王炯周柯陈雷刚
Owner SHANGHAI HUALI MICROELECTRONICS CORP