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Device for online observation and removal of dust on the surface of transmission mirror and its implementation method

An implementation method, dust technology, applied in chemical instruments and methods, cleaning methods and utensils, cleaning methods using gas flow, etc. Avoid secondary pollution, high observation accuracy and high removal efficiency

Active Publication Date: 2016-01-06
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The accuracy of this method for observing pollutants has a lot to do with light, and the observation accuracy is not high, and hard pollutants often scratch the surface of the transmission mirror due to uneven force when wiping manually. For this reason, the Livermore National Laboratory in the United States A set of on-line observation and removal system for impurities on the surface of transmission mirror is designed for NIF device
Although the system can find particles with a size of 10um and larger with the help of a high-power bar lamp, the bar lamp is expensive to manufacture; although the system can almost 100% remove particles above 30um with the help of high-speed airflow, the particles after purging are returned. environment, causing pollution to other optical components, and secondary pollution on the surface of the transmission mirror is unavoidable

Method used

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  • Device for online observation and removal of dust on the surface of transmission mirror and its implementation method
  • Device for online observation and removal of dust on the surface of transmission mirror and its implementation method

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Embodiment Construction

[0028] The present invention will be further described in conjunction with accompanying drawing and embodiment now.

[0029] see figure 1 , figure 2 , as can be seen from the figure, the transmission mirror surface dust online observation and removal device in the high-power laser device of the present invention includes a purging system 17, an illumination system 13, a dust collection system 1 and three sets of identical support positioning systems 22:

[0030] The support positioning system 22 includes a base 23, a support rod 4, a fixed connecting rod 3), a nut a5, a nut b11, a bolt 14 and two clamps 19, and the support rod 4 is vertically connected to the base 23 by threads; Two identical clamps 19 are connected by bolts 14 and nuts b11 and can rotate axially around the bolts 14; one clamp 19 is fixed on the support rod 4 with adjustable height and can rotate around the axial direction of the support rod 4; 19 Fix the fixed connecting rod 3, the connecting rod 3 can rot...

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Abstract

The invention discloses an online observing and removing device for dust on surfaces of transmission mirrors and an implementation method of the online observing and removing device. The device comprises a blowing system, a lighting system, a dust collecting system and three same supporting and positioning systems. The online observing and removing device and the implementation method thereof have the advantages that the device is ingenious in design and simple and easy to operate, the dust on the surfaces of the transmission mirrors can be detected and removed online in real time, and observation accuracy is high; removal efficiency is high, and secondary contamination to the surfaces of the transmission mirrors and contamination to other optical components are avoided; the device is applicable to the transmission mirrors placed at any angles.

Description

technical field [0001] The invention relates to a high-power laser device, in particular to a device for on-line observation and removal of dust on the surface of a transmission mirror in a high-power laser device and an implementation method thereof. Background technique [0002] The high-power laser facility is a laser facility that provides extremely high temperature and pressure conditions for inertial confinement fusion and high-energy physics research. The transmission mirror is the final key link that guides the beam from the main amplifier to the target chamber and forms the optical path. At present, the energy density that these transmission mirrors need to bear in the process of use is several J / cm 2 , but in the future these transmission mirrors need to bear an energy density of more than ten J / cm 2 , or higher, in this case, strict cleaning control is necessary to prevent damage to the surface of the transfer mirror and prolong the service life of the transfer ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B5/02B08B15/00
CPCB08B5/02B08B13/00B08B15/00
Inventor 李养帅朱健强庞向阳刘志刚焦翔吴永忠陶华
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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