Low temperature molecular sieve adsorption pump device
A technology of adsorption pump and molecular sieve, which is applied in the direction of pump devices, pumps, liquid displacement machinery, etc., can solve the problems of reducing service life, reducing service life, increasing application cost, etc., and achieves reduced application cost, high working limit, and convenient operation Effect
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[0017] In order to better understand the above object of the present invention, the present invention will be described in detail below in conjunction with the accompanying drawings.
[0018] The mechanical pump 1 is used as a back-stage vacuum pump, and is connected to the second straight-through valve 17 of the vacuum pipeline 4 through the bellows 2; several branch pipes are set on the vacuum pipeline 4 as required; among them, a switch angle valve 15 is set at the port of a branch pipe, and a low-temperature molecular sieve The adsorption pump 3 is connected with the switch angle valve 15 through the opening end of the vacuum chamber 11 of the cryogenic adsorption pump cavity 9; the resistance / ionization composite vacuum gauge 5 is set on other branch pipes of the vacuum pipeline 4, and is combined with the Type vacuum gauge controller 6 is connected to measure the degree of vacuum in the vacuum pipeline 4; as figure 1 shown.
[0019] Wherein, the main body of the vacuum ...
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