Biosensor and manufacturing method based on silicon nanowire tunneling field effect transistor

Abstract

The invention provides a biosensor based on a silicon nanowire tunneling field effect transistor and a manufacturing method of the biosensor. The manufacturing method comprises the following steps: manufacturing a silicon nanowire tunneling field effect transistor with a silicon nanowire channel with a triangular section; and performing reagent modification on the surface of the silicon nanowire channel to form an active film, and forming a capture probe on the surface of the active film. The biosensor is simple in technical process and high in controllability and is completely compatible with a conventional semiconductor process; the biosensor is low in cost and suitable for batch production; the device has bipolar performance, the bidirectional detection result is contrasted, the detection accuracy is guaranteed, and the biosensor is particularly applicable to biochemical molecule detection. In addition, a nanowire in a silicon nanowire sensor has the triangular section; compared with other nanowire structures (such as cylindrical and trapezoid cross sections), the structure has the advantages of larger specific surface area and higher modulation efficiency. Moreover, dense oriented single-molecule biosensitive films are easily formed on two faces (111) exposed on the silicon nanowire, and biosensing is promoted.

Description

technical field [0001] The invention relates to a semiconductor device structure and a manufacturing method thereof, in particular to a biosensor based on a silicon nanowire tunneling field effect transistor and a manufacturing method thereof. Background technique [0002] Molecular biology diagnostic technology is the crystallization of the great progress made in modern molecular biology and molecular genetics. The high-sensitivity detection of biomolecules has broad application prospects in disease detection, clinical medicine, environmental monitoring, drug analysis, and food fields. [0003] Nanomaterials have completely different properties from bulk materials, and their unique electrical, magnetic, optical, and thermal properties provide a new way for the detection of biomolecules. Sensors based on nanomaterials have the advantages of high sensitivity, high specificity, and fast response, but currently commonly used sensors such as nanoparticles and quantum dots need ...

AI Technical Summary

Problems solved by technology

[0006] In view of the shortcomings of the prior art described above, the object of the present invention is to provide a biosensor based on a silicon nanowire tunneling field effect transistor and a manufacturing method thereof, which are used to solve the problems in the prior art based on a silicon nanowire tunneling field effect transistor. The production cost of biosensors is high, the positioning is difficult, and the sensitivity is low due to the low surface area of ​​silicon nanowires.

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