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Electrostatic vibration energy collector and manufacturing method thereof

A vibration energy harvesting, electrostatic technology, applied in induction generators and other directions, can solve the problems of unsatisfactory charge storage and retention performance, incompatibility, and difficulty in miniaturization, and achieve superior charge retention performance, simple production, and easy miniaturization. Effect

Inactive Publication Date: 2014-07-02
SOUTHEAST UNIV
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Problems solved by technology

This electret-based electrostatic energy harvester does not require an external power supply, but it is not easy to be compatible with the CMOS process, it is bulky and difficult to miniaturize, and the charge storage and retention performance of the electret is difficult to meet the requirements of harsh environments such as high temperature and high humidity. application

Method used

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  • Electrostatic vibration energy collector and manufacturing method thereof
  • Electrostatic vibration energy collector and manufacturing method thereof

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Embodiment Construction

[0025] The present invention will be further described below in conjunction with drawings and embodiments.

[0026] like figure 1 As shown, the energy harvester of the present invention includes a charge trap type nonvolatile memory structure 10 , a support structure 21 , a cover plate 22 , and a movable metal electrode 23 . A cover plate 22 is provided on the upper surface of the charge trap nonvolatile memory structure 10 through a support structure 21 to form a cavity, and a movable metal electrode 23 is arranged in the cavity, and the movable metal electrode 23 can be used in the charge trap nonvolatile memory. Structure 10 surface motion. The supporting structure 21 is SU-8 glue, and the cover plate 22 is silicon. The movable metal electrode 23 is a cylinder with a diameter between 30 μm and 300 μm.

[0027] like figure 2 As shown, the charge trap type nonvolatile memory structure 10 of the energy harvester of the present invention includes a substrate 11 , a tunneli...

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Abstract

The invention discloses an electrostatic vibration energy collector and a manufacturing method thereof. A cover plate (22) is arranged on the upper surface of a charge trapping non-volatile memory structure (10) through a supporting structure (21) to form a cavity. A movable metal electrode (23) is arranged in the cavity, the movable metal electrode (23) can move on the surface of the charge trapping non-volatile memory structure (10), and the movable metal electrode is polarized by charges stored in the charge trapping non-volatile memory structure (10). The electrostatic vibration energy collector does not need an additional power supply, is simple in design and structure, has high energy collecting efficiency, is compatible to a CMOS technology, easy to miniaturize and high in reliability, and can be applied to the severe environment such as high temperature and high humidity.

Description

technical field [0001] The invention relates to an electrostatic vibration energy collector for collecting vibration energy in the environment and a manufacturing method thereof, in particular to an electrostatic vibration energy collector based on a charge trap type non-volatile memory structure and a manufacturing method thereof. Background technique [0002] Wireless sensor networks have broad application prospects in smart home, medical health, environmental monitoring, public safety and other fields. With the rapid development of wireless sensor networks, the demand for micro energy has also risen sharply. Micro-energy is used to provide power for wireless sensor network nodes. At present, micro-energy such as chemical energy batteries or fuel cells is generally used to power nodes. This type of battery has the disadvantages of large size and limited life, and needs to be replaced or refueled regularly, so it is difficult to meet the development needs of low-cost and m...

Claims

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Application Information

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IPC IPC(8): H02N1/06
Inventor 黄晓东黄见秋蒋明霞
Owner SOUTHEAST UNIV
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