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Heating container capable of detecting and preventing leakage of high-temperature metallic material and manufacturing method thereof

A technology for heating containers and metal materials, applied in metal material coating technology, metal processing equipment, semiconductor/solid-state device manufacturing, etc., can solve problems such as material loss, achieve quality assurance, overcome abnormal material loss, and overcome production schedule interruptions problem effect

Active Publication Date: 2014-07-30
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Therefore, the object of the present invention is to provide a heating container that can detect and prevent the leakage of high-temperature metal materials, overcome the problem of material loss caused by damage to the heating container, protect the heating device, and improve the ability to predict the risk of leakage
[0005] Another object of the present invention is to provide a method for manufacturing a heating container that can detect and prevent leakage of high-temperature metal materials, so that the heating container can overcome the problem of material loss caused by damage to the heating container, protect the heating device, and improve the ability to predict the risk of leakage

Method used

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  • Heating container capable of detecting and preventing leakage of high-temperature metallic material and manufacturing method thereof
  • Heating container capable of detecting and preventing leakage of high-temperature metallic material and manufacturing method thereof
  • Heating container capable of detecting and preventing leakage of high-temperature metallic material and manufacturing method thereof

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Embodiment Construction

[0030] see figure 2 , which is a structural schematic diagram of a preferred embodiment of a heating vessel capable of detecting and preventing leakage of high-temperature metal materials in the present invention. The heating container capable of detecting and preventing the leakage of high-temperature metal materials mainly includes: an internal heating container 22 for containing the metal material 23, an external heating container 24 for containing the internal heating container 22 and being heated by a heating device, and a detection device (not shown in the figure), in this preferred embodiment, the heating container is a heating container used for the OLED evaporation process, so an air hole 21 is provided above the internal heating container 22, and the metal material 23 contained in the internal heating container 22 After being heated and evaporated, it can escape from the air hole 21 in the direction of the arrow; between the internal heating container 22 and the ext...

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Abstract

The invention relates to a heating container capable of detecting and preventing the leakage of a high-temperature metallic material and a manufacturing method thereof. The heating container comprises an internal heating container for containing the metallic material, an external heating container and a detection device, wherein multiple segments of bottom conductive wires are arranged at a position, close to the junction of the bottom and the side surface of the internal heating container, between the internal heating container and the external heating container, two ends of each segment of bottom conductive wire are respectively connected with corresponding detection terminals located at the tops of the internal heating container and the external heating container by virtue of the corresponding conductive wires, and the detection device is used for detecting the leakage of the materials in the internal heating container by detecting the resistance between two detection terminals corresponding to two adjacent ends of two adjacent segments of bottom conductive wires. The invention also provides a manufacturing method of the heating container. The special design of the heating container provided by the invention is easy to detect whether the leakage of the heating container occurs or not and ensure the continuous conduction of related experiments and production in the case that the heating container is broken.

Description

technical field [0001] The invention relates to a heating container, in particular to a heating container capable of detecting and preventing leakage of high-temperature metal materials and a manufacturing method. Background technique [0002] OLED (Organic Light Emitting Diode, Organic Light Emitting Diode) has the advantages of all solid state, ultra-thin, no viewing angle limitation, fast response, room temperature operation, easy realization of flexible display and 3D display, etc., and is unanimously recognized as the mainstream technology of next-generation display. At present, the main method of OLED device production is heating evaporation coating, which mainly uses a heating container to heat the evaporation material in a vacuum environment, so that the sublimation or molten evaporation material is vaporized at a high temperature and deposited on a TFT structure or an anode. structure on the substrate. [0003] In the existing evaporation process, the mode of heati...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/54H01L51/56
CPCC23C14/243H10K71/00G01N27/20B23K31/02B23K31/12
Inventor 匡友元张鑫狄
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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