Vertical-layout single-array hot wire device for preparing diamond film

Abstract

The invention discloses a vertical-layout single-array hot wire device for preparing a diamond film, belongs to the coating technical field and particularly relates to a hot wire device for preparing a diamond film. The device comprises a vacuum chamber upper wall plate and a vacuum chamber lower wall plate, and is characterized in that an upper electrode plate is fixedly connected with the vacuum chamber upper wall plate; the single-row hot wires are vertically distributed, the upper ends of the hot wires are fixedly connected with the upper electrode plate, the lower ends of the hot wires are fixedly connected with the lower electrode plate; the lower end of the lower electrode plate is fixed on a hot wire force-regulating mechanism; the hot wire force-regulating mechanism is fixed on the vacuum chamber lower wall plate. The vertical-layout single-array hot wire device disclosed by the invention adopts single-ray hot wire vertical distribution, can be used for large-area coating on both surfaces, and reduces cost of hot wires; the vertically-distributed hot wires guarantee that samples are taken out on the condition that the hot wires are not damaged, so that cost of the hot wires is further lowered; the hot wire force-regulating mechanism at the lower ends of the hot wires can tighten the hot wires and limit the hot wires from swinging, so that uniform coating is realized.

Description

Technical field [0001] The invention belongs to the technical field of film coating, and particularly relates to a hot wire device for preparing a diamond film. Background technique [0002] Diamond has excellent properties such as force, heat, sound, light, electricity and chemistry. The performance of synthetic diamond film is basically close to that of natural diamond, and its excellent performance makes it have a wide range of application prospects in high-tech fields. At present, diamond film technology has been applied in many occasions such as cutting tools, high-performance electronic components, aerospace materials, etc., and has received excellent results. Its application in the high-tech field has attracted people's attention. [0003] At present, there are two main methods for preparing industrial CVD diamond films, one is hot filament chemical vapor deposition (HFCVD), and the other is microwave plasma chemical vapor deposition (MPCVD). The microwave method can prepa...

AI Technical Summary

Problems solved by technology

[0004] The hot wire device in the diamond coating equipment is a device used to generate diamond films in batches on the tool head. The traditional hot wire device is usually arranged horizontally, that is, the hot wire is arranged horizontally and horizontally. This structure can only use part of the hot wire. Side to heat the coating, the efficiency is very low, such as US patent US5997650

[0005] At present, the hot wire devices invented by some companies are vertically arranged, which can use the two sides of the hot wire to generate stone film, and the efficiency is significantly improved. Since the heating wire is elastic and the counterweight is free to hang, it will cause the lower electrode plate to shake, which will further cause the heating wire to shake. The instability of the heating wire will make the coating uneven and affect the diamond film formation quality of the tool.

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