Test system and test method for single particle adhesion and charge under vacuum condition

Abstract

The invention discloses a system for testing adhesive force between a single particle and a flat plate material and particle electric quantity under a vacuum condition. The system comprises a vacuum container and a pair of parallel electrode plates in the vacuum container. Two electrodes are respectively electrically connected with a direct current power supply outside the vacuum container through wires and load voltages through the power supply, a uniform electric field is generated between the two electrodes, an ultraviolet source or an electronic gun are arranged in the vacuum container, the single particle is made to be loaded with electricity, and a particle motion video recording device is arranged outside the vacuum container. The invention further discloses a test method. Compared with the prior art, the test environment of the system for testing single particle adhesive force and electric quantity is similar to a true environment, conformity of the test result is good, a test device is simple and can be implemented in any vacuum container, an expensive atomic force microscope is not needed, and vacuum transformation does not need to be conducted on a probe region.

Description

technical field [0001] The invention belongs to the technical field of physical parameter testing. Specifically, the invention relates to a system for testing the adhesion between tiny particles and a flat plate and the charged amount of the particles under vacuum conditions. Test methods for adhesion and particle charge. Background technique [0002] Usually, tiny particles come into contact with the plate material, and there will be an adhesion effect between the particles and the plate. Generally speaking, the smaller the particle size, the more obvious the adhesion effect, and it is even more obvious when the particle size is less than 1mm. . In the adhesion force measurement system, it is generally considered that the adhesion force is the resultant force of van der Waals force and electrostatic force between the particle and the flat plate, and the gravity of the particle is considered separately. [0003] At present, atomic force microscopy is usually used to test t...

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Problems solved by technology

[0004] 1. Tiny particles must be firmly fixed on the tip of the probe. The radius of the tip of the probe is generally 10 to tens of nanometers. It is very difficult to firmly fix the particles on such a tiny structure.

[0005] 2. Use an atomic force microscope to test the adhesion between a single particle and a flat plate. The relative distance between the two is artificially set and controlled by the tester. The relative distance cannot truly reflect the actual distance between the particle and the flat plate material. The distance between them is one of the most important factors affecting the adhesion between the two, so the atomic force microscope test method cannot reflect the real situation

[0006] 3. Under vacuum conditions, environments such as radiation and light may cause particles to be charged, and the charged charges are not easy to neutralize. The amount of charged particles is one of the most important factors affecting the adhesion of particles. The atomic force microscope is a finished product measuring instrument, and its test environment Particle charging cannot be simulated, and the measured adhesion forces therefore do not reflect reality

It can be seen that the existing atomic force microscope to measure the adhesion force between a single particle and a flat plate cannot reflect the real situation, and the measurement error is large. At the same time, it is impossible to accurately obtain the charge amount of a single particle.

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