A polysilicon reduction furnace chassis and tail gas cooling system and method thereof

Abstract

The invention discloses a polycrystalline silicon reduction furnace chassis and tail gas cooling system and a method thereof and relates to the fields of chassis and tail gas cooling process equipment of improved Siemens process polycrystalline silicon reduction furnaces and silane chemical vapor deposition (CVD) process polycrystalline silicon reduction furnaces. The polycrystalline silicon reduction furnace chassis comprises a reduction furnace chassis cooling structure and a tail gas cooling structure, wherein the reduction furnace chassis cooling structure and the tail gas cooling structure are connected through a flange; and the tail gas cooling structure comprises a tail gas cooling water inlet, a tail gas cooling water outlet pipe and a tail gas discharge pipe. Cooling water of different temperatures is adopted during chassis cooling and tail gas cooling, the cooling structure under the reduction furnace chassis is changed, heat byproduct water vapor in the tail gas can be fully utilized due to the changed cooling structure, the benefits are increased, and heat waste is avoided.

Description

technical field [0001] The invention relates to an improved Siemens method polysilicon reduction furnace and silane CVD method polysilicon reduction furnace chassis and tail gas cooling process equipment, in particular to a polysilicon reduction furnace chassis and tail gas cooling system and method thereof. Background technique [0002] The polysilicon reduction furnace is the core equipment for producing the final product in the production of polysilicon, and it is also the key link that determines the system capacity and energy consumption. Therefore, the design and manufacture of polysilicon reduction furnace directly affects the product quality, output and production cost. Under the influence of the global economic crisis, the price of polysilicon continued to drop, the industry profit was continuously compressed, and the market competition became increasingly fierce. Therefore, effectively reducing polysilicon energy consumption, improving product quality, and increas...

AI Technical Summary

Problems solved by technology

This utility model uses chassis cooling and reduction furnace internal upper cooling to double cool the reduction furnace, but this utility model still uses the traditional tail gas cooling method, that is, the polysilicon reduction furnace integrates the chassis cooling water and tail gas cooling water, although the reduction furnace The structure is relatively simple, but the large amount of heat contained in the process tail gas close to 700 ° C is not recycled, and it is wasted after cooling with low-temperature water

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