Cavity and valve integrated piezoelectric pump

Abstract

The invention relates to a cavity and valve integrated piezoelectric pump. A piezoelectric vibrator serves as a driving original part. The cavity and valve integrated piezoelectric pump is characterized by further comprising an integrated cavity and valve part; the piezoelectric vibrator is installed on one side of the integrated cavity and valve part, a cavity sunk groove corresponding to the piezoelectric vibrator in position is formed in the integrated cavity and valve part, after the piezoelectric vibrator is installed, a sealing cavity, namely a pump cavity is formed by the piezoelectric vibrator and the cavity sunk groove, a diversion groove is formed in the bottom of the cavity sunk groove, and an inlet and an outlet of the cavity are formed in the bottom of the diversion groove; an inlet valve opening is formed at the inlet, and an outlet valve opening is formed at the outlet; the piezoelectric vibrator is bent and deformed in a reciprocating mode under the alternating voltage function, and variation of the size of the pump cavity is caused; when the size of the pump cavity is increased, pressure is reduced, the inlet valve opening is opened, the outlet valve opening is closed, fluid flows into the cavity from the inlet; when the size of the pump cavity is reduced, the pressure is increased, the inlet valve opening is closed, the outlet valve opening is opened, the fluid flows out of the outlet, and the pumping capability is formed. The cavity and valve integrated piezoelectric pump has the advantage of being easy to assemble.

Description

technical field [0001] The invention belongs to the field of fluid delivery, and in particular relates to a cavity-valve integrated piezoelectric pump device. Background technique [0002] Piezoelectric pump is a micro-sized volumetric pump driven by piezoelectric vibrators. It has the advantages of simple structure for mass production, small size for miniaturization, digital control and long life. It is widely used in instrumentation, testing equipment and mechanical electronics. It has broad application prospects. Existing piezoelectric pumps include several typical forms of sheet bending direct drive, stack push diaphragm drive and resonance amplification drive. The above types of pumps include valve pumps and valveless pumps according to the types of valves. The output performance of the pump is obviously stronger than that of the valveless pump. Due to the small change in the cavity volume of the piezoelectric pump, the cut-off requirements for the check valve are hig...

AI Technical Summary

Problems solved by technology

[0003] In order to solve the inconvenience of large-scale production caused by complex valve assembly and high assembly precision requirements in the process of miniaturization of piezoelectric pumps, a cavity-valve integrated piezoelectric pump is proposed, which consists of two parts, namely Piezoelectric vibrator and integrated cavity valve components, in which the valve and the cavity are the same component, without assembly process, it has the characteristics of simple assembly and low assembly precision requirements in the miniaturization process, and is suitable for large-scale industrial production

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