Substrate detection method and device
A technology for substrate detection and detection area, applied in the field of substrate detection methods and devices, can solve the problems of long process time and low production efficiency, and achieve the effects of increasing detection area, improving production efficiency and shortening process time
Inactive Publication Date: 2014-09-24
BOE TECH GRP CO LTD
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Problems solved by technology
[0022] The embodiment of the present invention provides a substrate detection method and device, which are used to solve the problems of long process time and low production efficiency caused by the detection of large-size substrates by single-point scanning in the prior art
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[0065] Embodiments of the present invention provide a substrate inspection method and device, which are used to solve the problems of long process time and low production efficiency caused by inspection of large-size substrates by single-point scanning in the prior art.
[0066] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0067] Embodiment 1 of the present invention provides a substrate detection device, see Figure 4 , Figure 4 A schematic structural diagram of the substrate detection device provided in Emb...
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The invention provides a substrate detection method and device and aims at solving the problems of long process time and low production efficiency caused by large-size substrate detection in the prior art in a single-point scanning mode. The substrate detection device comprises a beam expander for expanding linearly polarized light passing through a polarizer, a light converging device for converging the linearly polarized light passing through an element to be detected, a beam splitter for dividing linearly polarized beams passing through the light converging device into multiple sub-beams and projecting each sub-beam into detection areas of a analyzer, the analyzer sending first light intensity and second light intensity corresponding to the detection areas to a controller, and the controller for calculating the actual phase delay amount of the element to be detected according to the first light intensity and the second light intensity corresponding to the detection areas and judging whether the element to be detected is qualified or not according to the actual phase delay amount and the preset phase delay amount.
Description
technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a substrate detection method and device. Background technique [0002] If there is stress in the glass element, it will change from the original optical isotropic state to anisotropic state, resulting in birefringence effect, see figure 1 . There are many reasons for the stress of glass components, generally in the following three aspects: (1) Stress caused by uneven plastic deformation; After the component is subjected to external force, uneven plastic deformation occurs in this area due to excessive local force, and when the external force is unloaded, stress will be generated in this area. At the same time, since the stress must reach self-equilibrium in the whole component, the part of the component that does not undergo plastic deformation also generates stress. (2) Thermal effect produces stress; this stress is caused by uneven plastic deformation and...
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IPC IPC(8): G01L1/24
Inventor 谷耀辉
Owner BOE TECH GRP CO LTD