Ultra-clean vacuum sealing method for optical lens

An optical lens and vacuum sealing technology, which is applied in the field of pollutant control, can solve the problems of high cost and vacuum pollution, achieve the effect of simple and easy replacement, overcome the problem of high cost, and solve the problem of vacuum pollution

Active Publication Date: 2014-10-01
SOUTHEAST UNIV
View PDF4 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Purpose of the invention: In order to overcome the deficiencies in the prior art, the present invention provides an ultra-clean vacuum sealing method for optical lenses, which solves the probl

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Ultra-clean vacuum sealing method for optical lens
  • Ultra-clean vacuum sealing method for optical lens
  • Ultra-clean vacuum sealing method for optical lens

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0023] The present invention will be further described below in conjunction with the accompanying drawings.

[0024] as attached figure 1 or attached figure 2 As shown, an ultra-clean vacuum sealing method for an optical lens, the installation device 2 and the optical lens 1 are sealed and fixed by a soft metal sealing ring 3 to control the pollution of organic pollutants caused by the rubber sealing ring. The soft metal sealing ring 3 is made of aluminum, tin, lead, indium, gold, silver or their alloy materials. The cross section of the soft metal sealing ring 3 is circular or rectangular or circular or crescent-shaped, the shape of the soft metal sealing ring 3 and the sealing groove 4 is circular or square, and the soft metal sealing ring 3 The circumference corresponds to the circumference of the sealing groove 4. The cross-section of the soft metal sealing ring 3 can be circular or square or circular or crescent-shaped, and a sealing ring with a circular cross-section...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses an ultra-clean vacuum sealing method for an optical lens. An installation device and the optical lens are sealed and fixed through a flexible metal sealing ring. The ultra-clean vacuum sealing method for the optical lens can solve the vacuum pollution problem caused by sealing through a traditional sealing ring and the problem of high cost of sealing through a metal flange, and replacement of the lens is simple and easy.

Description

technical field [0001] The invention relates to a technology for controlling pollutants caused by optical lens sealing in a system requiring vacuum cleanliness, in particular to an ultra-clean vacuum sealing method for optical lenses. Background technique [0002] In high-power laser pump light sources and applied optical systems, extreme ultraviolet light source optical systems, and ultra-clean analytical instruments, a large number of optical lenses are used, and some lenses also need to undertake the role of isolation between spaces with different pressure differences. Generally, the methods used are: Two types: one is the vacuum sealing scheme using rubber rings; the other is sealing the lens on the CF stainless steel flange through the glass-to-metal sealing scheme, through the knife edge on the stainless steel flange and the oxygen-free copper sealing ring Press and seal to realize space vacuum isolation. The first solution is simple and easy to operate, but because t...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G02B7/02
Inventor 张晓兵肖梅康学军夏柱红祁争健陈振乾
Owner SOUTHEAST UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap