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Double-ring-shaped integrated thermopile sensor

A technology that integrates pyroelectricity and sensors. It is used in instruments, thermometers, and scientific instruments that use electrical/magnetic components directly sensitive to heat. It can solve the measurement requirements that cannot meet high sensitivity and high measurement accuracy. , restricting the scope of use, etc., to achieve the effect of improving measurement accuracy and sensitivity, small relative error, and strong practicability

Active Publication Date: 2014-11-05
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Thermocouples are widely used as temperature sensors due to their durability, low price, easy operation, and large temperature measurement range, however, their low sensitivity and accuracy greatly restrict their range of use
The thermopile formed by connecting multiple thermocouples in series can improve the sensitivity and measurement accuracy, but the current single-ring thermopile composed of thermocouples has a large error, which cannot meet the measurement requirements of high sensitivity and high measurement accuracy in actual operation

Method used

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  • Double-ring-shaped integrated thermopile sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Such as image 3 As shown, it is a double-ring integrated thermopile sensor formed by V-type thermocouples connected in series. On the substrate e, there are inner rings and outer rings respectively composed of multiple thermocouples connected in series. The high temperature ends of all inner ring thermocouples are distributed in a small area centered on the center of the ring. This area is called temperature The sensing area is used to receive the infrared signal from the detection object, and its size is related to the size of the outer ring of the thermopile sensor. Taking a thermopile with a diameter of 200 μm as an example, the high-temperature ends of the inner ring thermocouples are distributed in an area with a diameter of about 30 μm centered on the center of the inner ring. The cold end one and the cold end two of the inner ring thermocouple are close to the high temperature end of the outer ring thermocouple. The first thermal electrode of the adjacent ther...

Embodiment 2

[0028] Such as Figure 4 As shown, it is a double-ring integrated thermopile sensor formed by grouping and connecting V-type thermocouples in series. The difference between this example and Example 1 lies in the connection mode of the thermocouple. Taking the inner ring as an example, the thermocouples in it are divided into two groups, the first group of thermocouples and the second group of thermocouples are distributed on the inner ring, and the first thermal electrode of the first thermocouple of the adjacent thermocouples in the same group is connected with The second thermal electrode of the second thermocouple is connected in series. In this way, the thermocouples in the same group are connected in series, and then the first thermal electrode (or second thermal electrode) in the first group of thermocouples is connected to the second thermal electrode. The second thermal electrodes (or the first thermal electrodes) in the group of thermocouples are connected in series,...

Embodiment 3

[0030] Such as Figure 5 As shown, it is a double-ring integrated thermopile sensor formed by connecting U-shaped thermocouples in series. The connection method is similar to that of Example 1, but U-shaped thermocouples are used, and the double-ring integrated thermopile sensor formed by it is more compact than the double-ring integrated thermopile sensor formed by V-shaped thermocouples in Example 1. In this example, the inner-ring lead-out electrodes f, h and the outer-ring lead-out electrodes g, k are respectively connected to the secondary measurement structure, and the thermomotive force on the electrodes f, h and electrodes g, k are calculated again in the secondary measurement structure In order to get the thermoelectric potential generated by the whole thermopile.

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Abstract

The invention relates to the field of temperature measurement and provides a double-ring-shaped integrated thermopile sensor. The double-ring-shaped integrated thermopile sensor comprises an inner ring and an outer ring, wherein the inner ring and the outer ring are distributed in a concentric and annular shape and are respectively composed of a plurality of thermocouples. Each thermocouple comprises a first thermode and a second thermode, one end of the first thermode is connected with one end of the second thermode to form a work end, the other end of the first thermode is a cold end I, the other end of the second thermode is a cold end II, the cold end I is separated from the cold end II, and the first thermode and the second thermode are connected in a V shape or U shape on the same substrate. The thermocouples are connected through the cold ends, the work ends of the thermocouples are closer to the circle center of the inner ring compared with the work ends, and the work ends of the thermocouples of the outer ring are close to the cold ends of the nearest thermocouples on the inner ring. The double-ring-shaped integrated thermopile sensor overcomes the defect of large errors of a single-ring-shaped thermopile, largely improves measurement accuracy and sensitivity, and is suitable for carrying out non-contact temperature measurement.

Description

technical field [0001] The invention relates to the field of non-contact temperature measurement, in particular to a double-ring integrated thermopile sensor. Background technique [0002] The Seebeck effect, also known as the first thermoelectric effect, refers to the thermoelectric phenomenon in which the voltage difference between two substances is caused by the temperature difference between two different electrical conductors or semiconductors. Thermocouples are developed based on the Seebeck effect. Among the thermocouples, the end directly used to measure the temperature of the medium is called the working end (also called the measuring end), and the other end is called the cold end (also called the compensation end); The display meter will indicate the thermoelectric potential generated by the thermocouple. Thermocouples are widely used as temperature sensors due to their durability, low price, easy operation, and large temperature measurement range. However, their...

Claims

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Application Information

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IPC IPC(8): G01K7/12
Inventor 乔明薛腾飞齐钊文帅张波
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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