Metal organic chemical vapor deposition device, gas spray component and gas distribution control method
A metal-organic chemistry, gas distribution technology, applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problems of expensive, complex processing and high maintenance costs
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0046] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0047] In the following description, many specific details are set forth in order to fully understand the present invention, but the present invention can also be implemented in other ways than those described here, so the present invention is not limited by the specific embodiments disclosed below.
[0048] figure 1 It is a schematic cross-sectional structure diagram of the metal-organic vapor deposition device provided by the present invention. see figure 1 , the metal chemical vapor deposition device 10 includes a reaction chamber 11, a gas shower assembly 12 and a base 13 arranged in the reaction chamber 11; the gas shower assembly 12 is fixedly arranged on the top of the reaction chamber 11, so The base 13 is disposed at the bot...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com