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Mask evaluation method for coded mask optical imaging system and mask structure code pattern

The technology of an optical imaging system and evaluation method is applied in the field of encoding mask optical imaging system, which can solve the problems of large amount of calculation and complicated process, and achieve the effect of avoiding replacement operation and avoiding operation error

Inactive Publication Date: 2014-11-19
TIANJIN UNIV
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Problems solved by technology

This method has a clear goal, but it needs to complete the whole process of the original scene passing through the optical system, being collected by the detector, and finally restored to an image. The process is complicated and the amount of calculation is large.

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  • Mask evaluation method for coded mask optical imaging system and mask structure code pattern
  • Mask evaluation method for coded mask optical imaging system and mask structure code pattern
  • Mask evaluation method for coded mask optical imaging system and mask structure code pattern

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Embodiment Construction

[0039]The mask evaluation method and mask structure code of the coding mask optical imaging system of the present invention will be described in detail below with reference to the embodiments and the accompanying drawings.

[0040] The mask evaluation method of the coding mask optical imaging system of the present invention is based on the principle of the point spread function of the imaging system on the final imaging quality, taking the point spread function of the coding mask imaging system as the evaluation object, and passing several index values and trends to judge the imaging performance of a pattern.

[0041] A mask evaluation method for a coded mask optical imaging system, including three evaluation indicators: M1, M2 and RA, and the three evaluation indicators are based on the point spread function h(x, y) in a certain area The concentrated energy is the calculation object, specifically:

[0042] The evaluation index formula M1(r) represents: take the imaging cen...

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Abstract

The invention provides a mask evaluation method for a coded mask optical imaging system and a mask structure code pattern. The mask evaluation method relates to three evaluation indexes including M1, M2 and RA. According to the mask structure code pattern, periodic arrangement is conducted on multiple square units which are completely identical in structure and meet the requirements of the Dammann optical grating structure, and then the square array structure is formed. The square array structure is an N*N array, wherein N is a positive integer and is larger than or equal to 3. By the adoption of the mask evaluation method for the coded mask optical imaging system and the mask structure code pattern, the coded mask optical imaging system is described based on the mask structure and the characteristics of a lens assembly, the point spread function of the system can be obtained more rapidly and more conveniently, the preparation process of manufacturing, construction and debugging of a real system is omitted, and operation errors possibly caused during actual measurement are avoided; the regulation function of different code pattern structures on the point spread function of the coded mask optical imaging system can be described objectively and can be used as the evaluation basis of the influence of the code pattern structures on the imaging quality of the whole system, and finally instructive suggestions are provided for design and optimization of the code pattern of coded masks of such imaging systems.

Description

technical field [0001] The invention relates to an encoding mask optical imaging system. In particular, it relates to a mask evaluation method of an encoding mask optical imaging system and a mask structure code pattern. Background technique [0002] The coded mask imaging system originated in the detection and imaging process of heavy particle rays such as X-rays. Since the long-distance heavy particle rays cannot be focused on the detector by the traditional optical lens system, a code mask with a certain pattern structure is used to modulate the heavy particle rays reaching the detection system, and the detection results need to be coordinated. The corresponding image decoding technology is used to restore and image the original heavy particle radiation source scene. (E.E. Fenimore, and T.M. Cannon, "Coded aperture imaging with uniformly redundant arrays," Appl Optics 17, 337-347 (1978)). [0003] Today, coded mask imaging technology has been widely used in visible lig...

Claims

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Application Information

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IPC IPC(8): G06F19/00G01M11/02
Inventor 张傲汪清金杰杨敬钰孙懿
Owner TIANJIN UNIV
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