Mask evaluation method for coded mask optical imaging system and mask structure code pattern
The technology of an optical imaging system and evaluation method is applied in the field of encoding mask optical imaging system, which can solve the problems of large amount of calculation and complicated process, and achieve the effect of avoiding replacement operation and avoiding operation error
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[0039]The mask evaluation method and mask structure code of the coding mask optical imaging system of the present invention will be described in detail below with reference to the embodiments and the accompanying drawings.
[0040] The mask evaluation method of the coding mask optical imaging system of the present invention is based on the principle of the point spread function of the imaging system on the final imaging quality, taking the point spread function of the coding mask imaging system as the evaluation object, and passing several index values and trends to judge the imaging performance of a pattern.
[0041] A mask evaluation method for a coded mask optical imaging system, including three evaluation indicators: M1, M2 and RA, and the three evaluation indicators are based on the point spread function h(x, y) in a certain area The concentrated energy is the calculation object, specifically:
[0042] The evaluation index formula M1(r) represents: take the imaging cen...
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