Vibration and magnetic field dual sensor

Abstract

The invention discloses a vibration-magnetic field dual sensor comprising a pedestal with a hollow structure, a magnetic sensing portion, a vibration sensing part, vibration sensing portion conductive welding needles and magnetic sensing portion conductive welding needles. The magnetic sensing portion, the vibration sensing part, the vibration sensing portion conductive welding needles and the magnetic sensing portion conductive welding needles are installed at the pedestal. The vibration sensing part includes an elastic plate, a piezoelectric plate installed at the elastic plate, and a magnetic oscillator; the peripheral edge of the elastic plate is supported at the pedestal; and the piezoelectric plate and the vibration sensing portion conductive welding needles are electrically connected to output a vibration signal. The magnetic sensing portion is used for sensing a changing magnetic field and generating a differential signal; and the magnetic sensing portion conductive welding needles and the magnetic sensing portion are electrically connected to output a magnetic variation signal. In conclusion, the provided sensor has the dual detection function for vibration and magnetic variation; and the application range is wide. The elastic plate vibrates along the axial direction; the resonant frequency is low; the detection sensitivity is high; and the structure is simple and the cost is low.

Description

technical field [0001] The invention belongs to the technical field of micro-nano electronics, and in particular relates to a dual vibration and magnetic field sensor for vibration monitoring and magnetic variation monitoring, which has simple structure, high precision and wide applicability. Background technique [0002] A magnetic sensor is a device that converts changes in the magnetic properties of sensitive components caused by magnetic fields, currents, stress and strain, temperature, light, etc. into electrical signals, and detects corresponding physical quantities in this way, and magnetic sensors are needed in many places in life , such as computer hard drives, compasses, household appliances, vehicles, etc. In these fields, magnetic sensors are needed for current sensing, angle sensing, gear sensing, and space environment measurement. To sum up, since the intensity of the detected signal is getting weaker and weaker, the sensitivity of the magnetic sensor needs to ...

AI Technical Summary

Problems solved by technology

[0003] However, the existing magnetic sensor, such as the magnetic sensor disclosed in the patent US20090195243, drives the movement of the magnet through the left and right swing of the cantilever beam to generate a changing magnetic field, and senses this change through GMR (Giant Magneto Resistive) to output a differential signal , due to the high resonance frequency of the cantilever beam, it is easy to limit the sensitivity of the magnetic sensor. If the cantilever beam is made too thin to reduce its resonance frequency in order to improve the sensitivity, it is easy to deform and will inevitably cause The distortion and deformation of the cantilever beam will bring detection errors, and the above-mentioned magnetic sensor has a complex structure, difficult assembly and high cost

Furthermore, this magnetic sensor can only detect magnetic changes, so its applicability is small

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