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Single-pixel structure, digital micro-mirror device with same and production method of single-pixel structure and digital micro-mirror device

A single-pixel, support structure technology, applied in the direction of instruments, optical components, optics, etc., can solve the problems of complex structure, not too small lens size, low yield rate, etc.

Active Publication Date: 2014-12-17
SEMICON MFG INT (SHANGHAI) CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] 1. The lens size of the reflector should not be too small, otherwise the charge attraction is not enough
[0007] 2. Under the condition of limited mirror lens size, the driving voltage depends almost entirely on the elastic modulus of the beam material
[0008] 3. Due to the complex structure involved, the number of masks is high, the cost is high, and the yield rate is low

Method used

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  • Single-pixel structure, digital micro-mirror device with same and production method of single-pixel structure and digital micro-mirror device
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  • Single-pixel structure, digital micro-mirror device with same and production method of single-pixel structure and digital micro-mirror device

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Embodiment Construction

[0043] It should be pointed out that the following detailed description is exemplary and intended to provide further explanation to the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

[0044] It should be noted that the terms used here are only used to describe specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should also be understood that when the terms "comprising" and / or "comprising" are used in this specification, it indicates There are features, steps, operations, means, components and / or combinations thereof.

[0045] For ease of description, spatially relative terms, such as "on," "over," "above," etc.,...

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Abstract

The invention provides a single-pixel structure, a digital micro-mirror device with the same and production method of the single-pixel structure and the digital micro-mirror device. The single-pixel structure comprises a substrate, a first conductive component and a reflector. The first conductive component is disposed on the substrate and provided with a left conductive part and a right conductive part. The reflector is disposed above the first conductive component in a suspension manner through a support structure which is disposed on the substrate or the first conductive component. The reflector comprises a reflecting part and a drive part vertical to the reflecting part. Part of the drive part extends to a part between the left conductive part and the right conductive part. Under a normal state, the drive part is vertical to the upper surface of the substrate and does not contact with the left conductive part and the right conductive part; when the left conductive part and the drive part apply voltage opposite in electric property, the drive part deflects towards the left conductive part; when the right conductive part and the drive part apply voltage opposite in electric property, the drive part deflects towards the right conductive part. By the structure, the reaction sensitivity of the reflector is increased, and the miniaturization manufacturing requirements of DMD chips are satisfied.

Description

technical field [0001] The present application belongs to the field of semiconductors, and in particular relates to a single-pixel structure, digital micromirror devices including the same, and their preparation methods. Background technique [0002] With the development of microelectromechanical systems (Microsoft-electronic-mechanical-systems, MEMS) and projection display technology, more and more solutions have been proposed to further improve the performance of MEMS to meet market demand. [0003] Texas Instruments (TI) has developed a digital micromirror device (Digital Micromirror Device, DMD), which uses extremely small mirrors to be suspended and can be tilted to both sides by about 10-12°, so that It constitutes two working states of on and off. The combination of the extraordinary fast switching speed of the DMD micromirror device and a precise image color and grayscale reproduction technology of double pulse width modulation makes the image clearer as the window ...

Claims

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Application Information

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IPC IPC(8): G02B26/08
Inventor 叶菲周强
Owner SEMICON MFG INT (SHANGHAI) CORP
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