Self-calibration method for grid point system error of two-dimensional grid plate

A system error and grid plate technology, applied in the field of grid point system error self-calibration, can solve the problem of not considering the coordinate origin deviation, etc., and achieve the effect of low calibration error and high calculation accuracy

Inactive Publication Date: 2014-12-24
SHANGHAI INST OF MEASUREMENT & TESTING TECH
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Problems solved by technology

However, this method does not consider the coordinate origin deviation generated when converting between the three basic positions, which will lead to the optimization result not necessarily the desired result

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  • Self-calibration method for grid point system error of two-dimensional grid plate
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  • Self-calibration method for grid point system error of two-dimensional grid plate

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Embodiment Construction

[0027] The technical solution of the present invention will be described in further detail below with reference to the accompanying drawings and specific implementation steps.

[0028] According to attached figure 1 ~ attached Figure 4 , a grid point system error self-calibration method of a two-dimensional grid plate of the present invention, comprising the following steps:

[0029] 1) Place the two-dimensional grid plate to be calibrated on the workbench of the image measuring instrument through the carrying fixture. The systematic error of each grid point on the two-dimensional grid plate is denoted as S n , and the systematic error of the image measuring instrument workbench corresponding to each grid point is recorded as A n , where n=[1,N], N is the number of grid points.

[0030] 2) At the initial position 0, use the image measuring instrument to sequentially read the center coordinates of each grid point, and record the reading as M 0,n , this measurement is dete...

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Abstract

The invention discloses a self-calibration method for the grid point system error of a two-dimensional grid plate. A two-dimensional image measuring instrument with the measurement accuracy not higher than that of the grid plate itself serves as a measuring tool, and the two-dimensional grid plate is installed on an image measuring instrument workbench through a bearing fixture. The coordinates of each grid point on the grid plate are read through the image measuring instrument, then, the grid plate is rotated by 90 degrees relative to the initial position, the coordinates of each grid point on the grid plate are read again, the grid plate is horizontally moved to the left and the right respectively for a grid interval with the initial position as the reference, and the coordinates of each grid point on the grid plate are read again. On the basis of the measurement data of the four grid positions or more positions, a measuring system matrix equation is established, and the grid point system error of the two-dimensional grid plate can be solved based on the least square method. Through the grid point system error self-calibration method of the two-dimensional grid plate, the function of calibrating the two-dimensional grid plate with the low-accuracy image measuring instrument is achieved, no extra high-accuracy calibration tool is needed, and the grid point system error self-calibration method of the two-dimensional grid plate is suitable for calibrating the accuracy of various types of two-dimensional grid plates.

Description

technical field [0001] The invention relates to a grid point system error self-calibration method of a two-dimensional grid plate, which belongs to the field of precision machining and measurement. Background technique [0002] With the continuous development of science and technology, the requirements for positioning and motion accuracy are getting higher and higher in the fields of semiconductor lithography, ultra-precision machining, biological cell manipulation and nanotechnology. Therefore, high-precision detection instruments have become important scientific devices in these fields. To ensure the measurement accuracy of the detection instrument, the device that can calibrate the instrument is essential. The two-dimensional grid plate is a standard device that can calibrate the in-plane positioning error of the testing instrument. Due to the manufacturing process and other reasons, the two-dimensional grid plate itself has grid point system errors, and it needs to be ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/04
Inventor 雷李华蔡潇雨李源傅云霞简黎
Owner SHANGHAI INST OF MEASUREMENT & TESTING TECH
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