Manufacturing method of vacuum adsorption sheet and fixing jig for singulation device
A technology of vacuum adsorption and fixture fixation, applied in manufacturing tools, workpiece clamping devices, etc., can solve the problem that electronic components cannot be transferred, and achieve the effect of complete close contact
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Embodiment 1
[0043] refer to figure 1 and figure 2 , the configuration of the vacuum suction sheet 2 according to the first embodiment (Embodiment 1) of the present invention will be described. The vacuum suction sheet 2 of this embodiment is mounted and fixed on a metal base 3 in a fixing jig 1 for simultaneously cleaning and inspecting many electronic components that have been separated into pieces. being used. The vacuum suction sheet 2 is provided so as to cover the protruding surface 31 protruding from the upper surface of the base 3 .
[0044] The vacuum suction sheet 2 is formed by molding silicon-based resin or fluorine-based resin into a sheet shape, and accommodating portions 23 serving as spaces having shapes corresponding to target electronic components are formed in a grid pattern on the surface of the sheet. In the present embodiment, the housing portions 23 are separated from each other via the grid-like boundary 26, but the vacuum suction used when cutting the resin enc...
Embodiment 2
[0051] An enlarged perspective view of a fixing jig 1A equipped with a vacuum suction sheet 2A according to a second embodiment (Embodiment 2) of the present invention is shown in Figure 6 middle. In the vacuum suction sheet 2A of this embodiment, a hemispherical protruding portion 28 is formed on the bottom surface of the housing portion 23A. As far as the protruding part 28 is concerned, it should be as low as possible in consideration of the elasticity of the vacuum suction sheet 2A and the strength of vacuum suction, so that after the vacuum suction is started from the suction hole 24A, the protruding part 28 can be sucked in a short time. One surface of the sheet is pressed and buried therein. In addition, the protruding portion 28 may be in the shape of a polygonal pyramid, a polygonal column, a column, or the like.
[0052] For the use of the vacuum suction sheet 2A, refer to Figure 6 Be explained. When the electronic component 40 with the lower surface 41 flat is...
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