A detachable independent vacuum chamber with in-situ measurement effect

Abstract

The invention provides a demountable independent vacuum cavity with an in-situ measurement effect. The demountable independent vacuum cavity is composed of a main cavity body (21), valves (22), flanges (23), an observation window (24), an ion gauge (25), a sample holder (32), a sample heating device (33), a magnetic rod (34), an SAES getter pump (42) and a small cavity body (41) where the SAES getter pump (42) is located. The demountable independent vacuum cavity is a stainless steel independent cavity for transferring samples under the ultrahigh vacuum condition, and the effect similar to in-situ measurement is achieved. The cavity can integrate material growing equipment, a measurement instrument and other resources, and cooperation opportunities of different laboratories are effectively increased. The demountable independent vacuum cavity is simple in design, low in cost and strong in function, and simple annealing treatment can be carried out on the samples. Spatial isolation of the material growing equipment and the measurement instrument is achieved, and greater possibility is brought to experimental study and cooperation.

Description

technical field [0001] The invention belongs to the technical field of vacuum system cavity design, and in particular relates to a detachable independent vacuum cavity used for transferring material samples under ultra-high vacuum conditions. Background technique [0002] The growth and preparation of new materials (such as some single crystals, powders, thin film oxides and an increasing number of devices) has become a very hot research topic. Carrying out experimental research on new materials has great scientific significance and broad application prospects. To study the properties of these materials usually requires the use of characterization equipment to test the properties of the materials. In most cases, material growth equipment and characterization instruments are two independent devices. At this time, it is difficult to accurately monitor the material preparation in real time. Simultaneous growth and measurement of these materials need to be carried out under ultr...

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Problems solved by technology

In most cases, material growth equipment and characterization instruments are two independent devices. At this time, it is difficult to accurately monitor the material preparation in real time. Simultaneous growth and measurement of these materials need to be carried out under ultra-high vacuum conditions.

At present, the more commonly used method is to connect the two sets of devices together for in-situ measurement (in-situ measurement refers to real-time test and analysis in scientific experiments), but this requires a relatively large experimental site, and at the same time brings great difficulties to cooperative research. a lot of inconvenience

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