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A detachable independent vacuum chamber with in-situ measurement effect

A vacuum cavity and in-situ measurement technology, which is applied in packaging under vacuum/special atmosphere, containers for flexible items, and packaging objects under special gas conditions, can solve the problem of large experimental sites, real-time monitoring of difficult material preparation, Inconvenience and other problems, to achieve multi-possibility, simple annealing treatment, to achieve the effect of space separation

Active Publication Date: 2017-07-28
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In most cases, material growth equipment and characterization instruments are two independent devices. At this time, it is difficult to accurately monitor the material preparation in real time. Simultaneous growth and measurement of these materials need to be carried out under ultra-high vacuum conditions.
At present, the more commonly used method is to connect the two sets of devices together for in-situ measurement (in-situ measurement refers to real-time test and analysis in scientific experiments), but this requires a relatively large experimental site, and at the same time brings great difficulties to cooperative research. a lot of inconvenience

Method used

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  • A detachable independent vacuum chamber with in-situ measurement effect
  • A detachable independent vacuum chamber with in-situ measurement effect
  • A detachable independent vacuum chamber with in-situ measurement effect

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Embodiment Construction

[0025] In the following description, for purposes of explanation, certain details are set forth in order to provide a thorough understanding of the invention. It will be apparent, however, to one skilled in the art that the invention may be practiced with some or all of its features, and that the invention may be practiced without some of the specific details. In other instances, well-known structures and devices are shown in block diagram form in order not to obscure the underlying principles of the invention.

[0026] It should be understood that figure 1 4 is schematic only and may not be drawn to scale.

[0027] The present invention has designed a kind of independent cavity that can transfer sample, below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail:

[0028] figure 1 It is the use flowchart of the present invention. Usually, the sample growth system 11 (such as a pulsed laser deposition device) is d...

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Abstract

The invention provides a demountable independent vacuum cavity with an in-situ measurement effect. The demountable independent vacuum cavity is composed of a main cavity body (21), valves (22), flanges (23), an observation window (24), an ion gauge (25), a sample holder (32), a sample heating device (33), a magnetic rod (34), an SAES getter pump (42) and a small cavity body (41) where the SAES getter pump (42) is located. The demountable independent vacuum cavity is a stainless steel independent cavity for transferring samples under the ultrahigh vacuum condition, and the effect similar to in-situ measurement is achieved. The cavity can integrate material growing equipment, a measurement instrument and other resources, and cooperation opportunities of different laboratories are effectively increased. The demountable independent vacuum cavity is simple in design, low in cost and strong in function, and simple annealing treatment can be carried out on the samples. Spatial isolation of the material growing equipment and the measurement instrument is achieved, and greater possibility is brought to experimental study and cooperation.

Description

technical field [0001] The invention belongs to the technical field of vacuum system cavity design, and in particular relates to a detachable independent vacuum cavity used for transferring material samples under ultra-high vacuum conditions. Background technique [0002] The growth and preparation of new materials (such as some single crystals, powders, thin film oxides and an increasing number of devices) has become a very hot research topic. Carrying out experimental research on new materials has great scientific significance and broad application prospects. To study the properties of these materials usually requires the use of characterization equipment to test the properties of the materials. In most cases, material growth equipment and characterization instruments are two independent devices. At this time, it is difficult to accurately monitor the material preparation in real time. Simultaneous growth and measurement of these materials need to be carried out under ultr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N35/00G01N35/10B65D81/20B65D85/86B65D85/07
Inventor 孔帅孙喆崔胜涛居赛龙张国斌
Owner UNIV OF SCI & TECH OF CHINA
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