The application discloses a two-dimensional acceleration sensor based on a ring-shaped weak
coupling structure and relates to the technical field of weak vibration
signal detection. The two-dimensional acceleration sensor comprises a center support structure, a ring-shaped weak
coupling structure, a
cantilever beam plus
mass sensitive detection structure and a piezoelectric excitation and detection unit. The center support structure supports the ring-shaped weak
coupling structure through elastic spokes, the ring-shaped weak coupling structure is composed of an inner ring, an outer ring and a
coupling beam connecting the two, the piezoelectric excitation unit is arranged on the inner ring for generating in-plane traveling wave vibration, and a plurality of
cantilever beam plus
mass sensitive units are symmetrically distributed along the outer ring in the circumferential direction. The application constructs a ring-shaped weak
coupling vibration energy network, realizes the propagation and redistribution of vibration energy among the plurality of sensitive units, separates the excitation and detection regions in space, effectively improves the weak acceleration detection sensitivity, reduces excitation
crosstalk and realizes the decoupling detection of two-dimensional acceleration, and is suitable for the fields of high-precision inertial measurement and weak vibration monitoring.