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Airflow sensor based on graphene nanowall and manufacturing method

A graphene nano wall and airflow sensor technology, applied in the field of airflow sensors, can solve the problems of high cost and large volume, and achieve the effects of low power consumption, good flexibility and excellent detection characteristics

Active Publication Date: 2015-01-28
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Application Information

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Problems solved by technology

However, this type of sensor is limited by the sensitivity of sensitive materials, the volume is also large, and the cost is high

Method used

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  • Airflow sensor based on graphene nanowall and manufacturing method
  • Airflow sensor based on graphene nanowall and manufacturing method
  • Airflow sensor based on graphene nanowall and manufacturing method

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Embodiment Construction

[0024] In order to make the purpose, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0025] Graphene is a new type of two-dimensional crystal material, which is composed of a single layer of carbon atoms arranged in a honeycomb shape in a regular hexagonal shape. Due to the low-dimensional quantum properties of graphene and the chemical bonds formed by the unique sp2 hybridization, its free electron gas behavior is similar to that of massless Dirac fermions, so it exhibits very excellent mechanical, thermal, optical, and electrical properties. Graphene nanowalls are structured multilayer graphene, and the research found that the resistance of graphene nanowalls is very sensitive to the vibration of the substrate. The gas flow will cause a small vibration of the flexible substrate, which will cause the resistance of the sensitive layer of the grap...

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Abstract

The invention discloses an airflow sensor based on a graphene nanowall. The airflow sensor comprises a flexible substrate, the graphene nanowall arranged on the flexible substrate and electrodes arranged on the graphene nanowall, and the flexible substrate will vibrate slightly due to air flow, so that the resistance of the graphene nanowall is changed. The invention further provides a method for manufacturing the airflow sensor. The airflow sensor has the good detecting performance for air flow and is small in size, low in power dissipation, stable in performance and good in flexibility and wearable performance.

Description

technical field [0001] The invention relates to an airflow sensor, in particular to an airflow sensor based on a graphene nano-wall and a method for making the sensor. Background technique [0002] With the progress of society and the development of science and technology, people's requirements for airflow sensors are getting higher and higher. Airflow sensors sense the flow of outside air and convert this information into electrical signals. A widely used airflow sensor is based on a mechanical structure driven by a rubber membrane or a magnetically controlled switch. The flow of gas will drive the vibration of the rubber membrane, causing the movement of the mechanical structure or the magnetic control switch, thereby converting the flow of gas into an electrical signal. Although this sensor has a simple structure, it has a large volume and high power consumption. There are also other airflow sensors in the prior art, for example, sensors based on thermistors, thermosen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/16
Inventor 杨俊魏大鹏汤林龙史浩飞杜春雷
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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