low energy electron gun

Abstract

The invention discloses a low-energy electronic gun. The low-energy electronic gun comprises an electron emission device for emitting electrons, a grid electrode device for accelerating the electrons and controlling the quantity and speed of the electrons, a focusing device for conducting shape constraint on an electron beam formed by the electrons, an electronic gun housing for containing the focusing device in the cavity and a supporting device for fixing the electron emission device, the grid electrode device and the focusing device in the electronic gun housing and playing a fixing and supporting role. The focusing device is composed of three mutually-matched annular electrodes. One annular electrode is a positive potential electrode, the front end of the positive potential electrode is insulated and spaced from the other two annular electrodes through insulating ball, and the rear end of the positive potential electrode is insulated and spaced from the grid electrode device through an insulating ball as well. The other two annular electrodes are mutually matched to form an electrode structure, and the electrode structure is in a zero potential mode. The low-energy electronic gun has the advantages of being low in energy, adjustable in electron quantity and energy level, compact in structure, convenient to use and the like.

Description

technical field [0001] The invention relates to a device capable of emitting low-energy electrons, in particular to a low-energy electron gun. Background technique [0002] X-ray photoelectron spectroscopy is an electron spectroscopy based on the photoelectric effect. It uses X-ray photons to excite the inner electrons of the surface atoms of the material, and obtains surface composition and electronic state information through energy analysis of these electrons. means. During the X-ray irradiation process, due to the release of a large number of electrons, the substance with relatively poor conductivity is easy to be positively charged, and once the substance is charged, there will be a large deviation or even a wrong conclusion in the analysis of the photoelectron spectrum. Neutralize with electronic compensation. [0003] The electron energy level emitted by traditional electron guns for charge neutralization of substances is single, the adjustable range of electron ene...

AI Technical Summary

Problems solved by technology

[0003] The energy level of electrons emitted by the traditional electron gun for charge neutralization of substances is single, the adjustable range of electron energy levels is small, the neutralization range of electrons on the surface of substances is small, and the original state of substances is easily excited, which cannot meet the purpose of electron neutralization

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