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Semiconductor measuring device

A measurement equipment and semiconductor technology, applied in the measurement field, can solve the problems of difficult wiring, many cables, and difficult installation, and achieve the effect of easy installation, saving floor space, and reducing complexity

Inactive Publication Date: 2015-02-11
RAINTREE SCI INSTR SHANGHAI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The problem to be solved by the invention is that the semiconductor measuring equipment measures many kinds of sensors inside the semiconductor measuring equipment, resulting in many cables, difficult wiring, difficult installation, fault diagnosis and maintenance, etc.

Method used

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  • Semiconductor measuring device
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Embodiment Construction

[0035] The specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood, however, that the specific embodiments discussed are merely illustrative of specific ways to make and use the invention, and do not limit the scope of the invention.

[0036] figure 1 A schematic diagram 100 of a wireless sensor network inside a semiconductor measurement device is shown. It uses a microcontroller that supports wireless communication protocols to collect sensor data distributed throughout the semiconductor measurement equipment. Through the Zigbee wireless protocol, a large number of sensors form a local area network, and transmit the sensor data from various locations to the main control semiconductor. Measuring equipment computer. It can be seen from the figure that multiple sensor modules form a Zigbee local area network, and a microcontroller circuit is used as a route to communicate with the ho...

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Abstract

The invention relates to a semiconductor measuring device. The semiconductor measuring device comprises at least one sensor for detecting onsite parameters, and a microcontroller in communication connection with the at least one sensor, wherein the microcontroller supports a wireless communication protocol, and the sensor communicates with the microcontroller through the wireless communication protocol so as to acquire sensor data at each position of the sensor measuring device. According to the invention, the semiconductor measuring device employs the wireless communication protocol to replace a conventional wired cable, such that the structural complexity of the semiconductor measuring device is greatly reduced, networking is facilitated, replacement of a fault component can be realized in a quite simple manner in case that a fault is generated at a certain sensor, and the complex wiring problem does not have to be involved.

Description

technical field [0001] The present invention relates to the field of measurement technology, more specifically, to a semiconductor measurement device based on wireless sensor technology of wireless communication technology. Background technique [0002] Semiconductor measurement equipment needs to measure multiple environmental parameters, such as temperature, humidity, differential pressure, vacuum, compressed gas pressure, flow and other sensors. The sensors are distributed throughout the semiconductor measurement equipment, and are currently connected by cables. In the existing design, the sensors are distributed everywhere in the semiconductor measurement equipment, and there are many cables, dozens of them, the wiring is complicated, and the installation is inconvenient. If a fault occurs, it is difficult to troubleshoot and replace. The downtime of semiconductor measurement equipment is time-consuming and costly. [0003] On the other hand, with the shrinking of proce...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D21/02G05B19/042
Inventor 郭一鸣郭亚娟周万泉
Owner RAINTREE SCI INSTR SHANGHAI
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