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Method of manufacturing target for sputtering and method of manufacturing organic light-emitting display apparatus

An organic light-emitting device, sputtering target technology, applied in sputtering coating, semiconductor/solid-state device manufacturing, vacuum evaporation coating and other directions, can solve problems such as affecting the characteristics of the encapsulation structure

Inactive Publication Date: 2015-02-25
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The process of manufacturing the sputtering target can affect the improvement of the characteristics of the encapsulation structure

Method used

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  • Method of manufacturing target for sputtering and method of manufacturing organic light-emitting display apparatus
  • Method of manufacturing target for sputtering and method of manufacturing organic light-emitting display apparatus
  • Method of manufacturing target for sputtering and method of manufacturing organic light-emitting display apparatus

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Embodiment Construction

[0039] Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout. In this regard, exemplary embodiments of the present invention may have different forms and should not be construed as being limited to the descriptions set forth herein.

[0040] It will be further understood that the term "comprising" used herein indicates the presence of stated features or components, but does not exclude the presence or addition of one or more other features or components.

[0041] It will be understood that when a layer, region or component is referred to as being "formed on" another layer, region or component, that layer, region or component can be directly or indirectly formed on said another layer, region or component. area or component. That is, for example, intervening layers, regions or components may be present.

[0042] The size of elements in ...

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PUM

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Abstract

A method of manufacturing a sputtering target includes: preparing a sputtering target material including a low temperature viscosity transition (LVT) inorganic material, melting the sputtering target material at a working pressure that is lower than atmospheric pressure, and processing the melted sputtering target material to thereby form the sputtering target.

Description

[0001] This application claims priority from Korean Patent Application No. 10-2013-0096105 filed on Aug. 13, 2013, the disclosure of which is hereby incorporated by reference in its entirety. technical field [0002] The present disclosure relates to a method of manufacturing a target for sputtering and a method of manufacturing an organic light emitting display device. Background technique [0003] Recently, various types of display devices have been used. Specifically, thin and light display devices tend to be widely used. An organic light emitting display device among thin and light display devices is a self-emissive type display device having, for example, good power consumption, good viewing angle, and good image quality. [0004] An organic light emitting display device includes an organic light emitting device having a first electrode, a second electrode, and at least an organic emission layer disposed therebetween. [0005] An organic light emitting device may be s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34H01L51/56
CPCC23C14/086H01J37/3426C23C14/3414C23C14/3407H01J37/3414H01L51/5253B05D5/00H10K71/00H10K59/873C23C14/34H10K50/844
Inventor 丁善英申尚煜李壹相金东镇朴镇宇
Owner SAMSUNG DISPLAY CO LTD