Method for optimizing design parameters of induction cavity of micro-channel acceleration meter
A technology of accelerometer and design parameters, which is applied in the field of sensors, can solve the problems of time-consuming and labor-intensive, and increase R&D costs, and achieve the effects of reducing R&D costs, improving R&D efficiency, and speeding up R&D speed
Active Publication Date: 2015-03-04
JILIN UNIV
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Problems solved by technology
The design of different parameters of traditional sensors needs to provide different samples for analysis, which is time-consuming and laborious, and increases the cost of research and development
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[0098] According to the above process of modeling, input the corresponding parameters during the modeling process, the built model is as follows image 3 shown. The mesh division diagram of the model is as follows Figure 4 As shown, the calculation result of the concentration of a filling variable in the model is as follows Figure 5 As shown, the calculation result of the current density of the z component is as follows Figure 5 As shown, the current density calculation results of the x and y components are not shown here. Then the calculation results are analyzed, and finally the design parameters are optimized according to the calculation results.
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The invention provides a method for optimizing design parameters of an induction cavity of a micro-channel acceleration meter and belongs to the field of sensors. According to the method for optimizing design parameters of the induction cavity of the micro-channel acceleration meter, dynamic and static characteristics of the micro-channel acceleration meter are analyzed on the basis of finite element analysis software-COMSOLMultiphysics so as to search an optimal performance sensing occasion. The method comprises the following steps: establishing a three-dimensional dynamic model which comprises a Nernst-Planck equation and a lamellar flow field; drawing a designed micro-channel induction cavity three-dimensional structure of the micro-channel acceleration meter in the established model according to the design size of the micro-channel induction cavity; inputting four parameter values such as electrolyte conductivity, relative dielectric constant, electrolyte concentration and viscosity of the designed micro-channel acceleration meter; optimizing the design parameters according to the calculation result. According to the method, certain design parameters can be obtained by virtue of computer simulation and the internal condition of the reaction cavity of the acceleration meter can be further known under the condition of no micro-channel acceleration meter sample, and the development cost is quickened, and the development cost is reduced by virtue of simulated analysis on the condition of design parameters.
Description
technical field [0001] The invention belongs to the field of sensors. Background technique [0002] Micro-channel accelerometer is a new type of acceleration sensing component based on "micro-channel inertial sensing technology" that has appeared abroad in recent years. The change of ion concentration caused by the convection effect of the internal electrolyte realizes the measurement of acceleration, thus avoiding the use of inertial mass structure, so the impact resistance is excellent (up to 30000G or more). [0003] The establishment of the microchannel accelerometer model is carried out for the microchannel sensing cavity, which is composed of two pairs of porous electrodes placed in a closed cavity filled with electrolyte, and there is a certain gap between the two pairs of positive and negative electrodes. electric potential. When the outside world moves, the electrolyte in the reaction chamber flows through the micro-channel sensing chamber, and the cathode and ano...
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IPC IPC(8): G06F17/50
Inventor 周求湛王聪香李大一姚为星陈永志
Owner JILIN UNIV