Rotary plate positioning device, loading transmission system and plasma processing equipment
A technology of positioning device and turntable, which is applied in the direction of conveyor objects, transportation and packaging, metal material coating technology, etc., can solve the problems of wrong judgment of whether the turntable station is in place, not in place, mechanical failure, etc., to avoid mechanical failure, Ensure normal operation, improve safety and stability
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Embodiment 1
[0044] Figure 4A It is a top view of a turntable positioning device provided in Embodiment 1 of the present invention. Figure 4B for Figure 4A Side view on A upward. Please also refer to Figure 4A and Figure 4B , in this embodiment, the turntable 50 is provided with stations 51 , the number of stations 51 is multiple, and arranged at intervals along the circumference of the turntable 50 .
[0045] In the position detection unit, the first identification module includes a first protrusion 54, the first protrusion 54 is arranged on the outer peripheral wall of the turntable 50, and the number and position correspond to the number and position of the station 51 one by one; the first detection The module includes a first distance sensor 52 and a first controller (not shown in the figure), wherein the first distance sensor 52 is arranged on the periphery of the outer peripheral wall of the turntable 50, for when the turntable 50 rotates from its origin position, it moves t...
Embodiment 2
[0057] Figure 6A It is a top view of the turntable positioning device provided by Embodiment 2 of the present invention. Figure 6B for Figure 6A Sectional view along line A-A in middle. Please also refer to Figure 6A and Figure 6B , in this embodiment, the turntable 50 is provided with stations 51 , the number of stations 51 is multiple, and arranged at intervals along the circumference of the turntable 50 .
[0058] In the in-position detection unit, the first identification module includes a first through hole 61 disposed on the bearing surface of the turntable 50 where the station 51 is located (that is, the surface of the turntable for carrying workpieces) and penetrating through the thickness of the turntable 50 , and The number and position of the first through holes 61 correspond to the number and position of the stations 51; the first detection module includes a first through-beam sensor 63 and a first controller (not shown in the figure), wherein the first pa...
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