Turntable positioning device, loading transfer system and plasma processing equipment

Abstract

A rotary table positioning device, a load transmission system and a plasma processing device. The rotary table positioning device comprises a rotary table (50), an in-position detection unit and an original-point detection unit. The in-position detection unit comprises a first identification module and a first detection module. The first identification module is used for identifying the position of a work station on the rotary table, and the first detection module is used for judging whether the work station reaches a pre-set position by detecting the first identification module. The original-point detection unit comprises a second identification module and a second detection module. The second identification module is used for identifying an original-point position, and the second detection module is used for judging whether the work station reaches the original-point position by detecting the second detection module. The provided rotary table positioning device, load transmission system and plasma processing device can learn whether an abnormal position appears in the work station of a rotary table, which can not only guarantee a normal working process, but can also avoid the occurrence of mechanical failures, so that the security and stability of plasma processing can be improved.

Description

Technical field [0001] The invention belongs to the field of semiconductor equipment manufacturing, and specifically relates to a turntable positioning device, a loading transmission system and a plasma processing equipment. Background technique [0002] With the continuous development of microelectronics technology, the competition among related manufacturing companies has become more and more fierce. Lowering costs and improving production efficiency are commonly used methods to improve corporate competitiveness. For example, in order to improve production efficiency and reduce production costs, in the process of the process, the loading and transmission system is used to implement different processes on multiple substrates at the same time to meet the increasing market demand. [0003] figure 1 It is a schematic diagram of an existing loading transmission system. Figure 2A for figure 1 Top view of the middle reaction chamber. Figure 2B For the edge Figure 2A A cross-sectional...

AI Technical Summary

Problems solved by technology

[0007] Since the above-mentioned turntable positioning device can only locate the origin of the turntable, but cannot monitor whether the station of the turntable reaches the predetermined position during the process, it is impossible to know the abnormal position of the station of the turntable in time, which will not only cause the work process to be unable to continue , and may also cause mechanical failure, thereby reducing the safety and stability of plasma processing equipment

[0008] Although the motion controller of the motor can indirectly know the rotation angle of the turntable by detecting the rotation angle of the motor, the rotation angle of the turntable will often be deviated due to mechanical errors due to the rotation mechanism itself and the transmission between the turntable and the turntable. As a result, during the process, the motor rotates in place but the position of the turntable is not in place, or because the edge of the turntable will amplify the angle deviation of the turntable, the angle deviation of the turntable rotation mechanism does not exceed the allowable range, while the angle of the turntable edge When the deviation exceeds the allowable range

When the above two situations occur, the motion controller of the motor will still provide a feedback signal indicating that the position of the turntable is in place, resulting in a wrong judgment on whether the position of the turntable is in place, which will also cause mechanical failure, thereby reducing the plasma processing efficiency. Device Security and Stability

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