Rotary plate positioning device, loading transmission system and plasma processing equipment

Abstract

The invention provides a rotary plate positioning device, a loading transmission system and plasma processing equipment. The rotary plate positioning device comprises a rotary plate, an origin detecting unit and an in-place detecting unit. A station is arranged on the rotary plate for bearing a workpiece; the origin detecting unit is used for detecting the origin position of the rotary plate; thein-place detecting unit comprises a first detecting module and a first identification module, wherein the first identification module is used for identifying the position, on the rotary plate, of theidentified station; and the first detecting module is used for determining whether the station reaches a predetermined position or not by detecting the first identification module. The rotary plate positioning device provided by the invention can be used for monitoring whether the station of the rotary plate reaches the predetermined position or not, so that the position abnormity appearing in thestation of the rotary plate can be timely obtained.

Description

[0001] The invention is a divisional application with application number: 201310406341.4, application date: September 9, 2013, and title of invention: turntable positioning device, loading transmission system and plasma processing equipment. technical field [0002] The invention belongs to the field of semiconductor equipment manufacturing, and in particular relates to a turntable positioning device, a loading transmission system and plasma processing equipment. Background technique [0003] With the continuous development of microelectronics technology, the competition of related production enterprises is becoming more and more fierce. Reducing costs and improving production efficiency are common means to improve the competitiveness of enterprises. For example, in order to improve production efficiency and reduce production cost, during the process of the process, the loading and conveying system is used to implement different processes on multiple substrates at the same ti...

AI Technical Summary

Problems solved by technology

[0008] Since the above-mentioned turntable positioning device can only locate the origin of the turntable, but cannot monitor whether the station of the turntable reaches the predetermined position during the process, it is impossible to know the abnormal position of the station of the turntable in time, which will not only cause the work process to be unable to continue , and may also cause mechanical failure, thereby reducing the safety and stability of plasma processing equipment

[0009] Although the motion controller of the motor can indirectly know the rotation angle of the turntable by detecting the rotation angle of the motor, the rotation angle of the turntable will often be deviated due to mechanical errors due to the rotation mechanism itself and the transmission between the turntable and the turntable. As a result, during the process, the motor rotates in place but the position of the turntable is not in place, or because the edge of the turntable will amplify the angle deviation of the turntable, the angle deviation of the turntable rotation mechanism does not exceed the allowable range, while the angle of the turntable edge When the deviation exceeds the allowable range

When the above two situations occur, the motion controller of the motor will still provide a feedback signal indicating that the position of the turntable is in place, resulting in a wrong judgment on whether the position of the turntable is in place, which will also cause mechanical failure, thereby reducing the plasma processing efficiency. Device Security and Stability

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