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A mechanical arm collision protection device

A collision protection and manipulator technology, applied in the field of manipulators, can solve problems such as damage to parts and reduce losses

Active Publication Date: 2016-05-11
SHENYANG KINGSEMI CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problem of parts damage caused by the collision between the finger of the manipulator and other objects, the object of the present invention is to provide a collision protection device for the manipulator

Method used

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  • A mechanical arm collision protection device
  • A mechanical arm collision protection device

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Embodiment Construction

[0013] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0014] Such as figure 1 , figure 2 As shown, the present invention includes a finger part, a detection device and an arm connecting plate 1 installed on the manipulator arm, wherein the finger part includes a finger 8 and a finger connecting plate 6, and the finger connecting plate 6 is the connection between the finger 8 and the arm part of the manipulator. One end of the finger 8 carries the wafer, and the other end of the finger 8 is fixedly connected with the finger connecting plate 6 through the screw 7 to form the finger part of the robotic hand.

[0015] The arm connecting plate 1 is provided with a plurality of connecting holes 9, which can be connected with the arm of the robot and belong to the arm part of the manipulator. The finger connecting plate 6 is clamped and connected with the arm connecting plate 1 by the spring clip 5, and can move rel...

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Abstract

The invention relates to a mechanical arm used for carrying wafers in the manufacturing process of semiconductors, in particular to a mechanical arm collision protecting device. The mechanical arm collision protecting device comprises a finger part, detection devices and an arm connecting plate which is mounted on a mechanical arm. The finger part is connected with the arm connecting plate through spring clips in a clamping mode, and the finger part which is impacted by external force can move relative to the arm connecting plate. The detection devices used for detecting the relative movement of the finger part and the arm connecting plate are mounted on the finger part and the arm connecting plate. According to the mechanical arm collision protecting device, when the mechanical arm collides with other objects, a sensor is used for detecting the relative movement of a finger connecting plate and the arm connecting plate, the mechanical arm is controlled to stop moving in emergency, the mechanical arm and the objects which collide with machines can be protected, and thus the loss caused by collision is reduced; after collision happens to mechanical arm fingers, parts do not need to be replaced, the spring clips are removed, and after the positions of positioning pieces and the positions of positioning holes are adjusted, the mechanical arm can recover to be in a normal using state.

Description

technical field [0001] The invention relates to a manipulator for transporting wafers in the semiconductor manufacturing process, in particular to a manipulator collision protection device. Background technique [0002] During semiconductor manufacturing, wafers are handled by robotic arms. During the movement of the manipulator, for some reason, when the fingers of the manipulator collide with other objects, it will cause damage to the manipulator and the objects colliding with it, or cause personal injury, and the loss will be heavy. Once the fingers of the manipulator collide, only parts can be replaced, which not only delays the work, but also increases the production cost. Contents of the invention [0003] In order to solve the problem of component damage caused by the collision between the finger of the manipulator and other objects, the object of the present invention is to provide a collision protection device for the manipulator. The manipulator collision prote...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25J13/08B25J19/06
Inventor 门恩国王继周
Owner SHENYANG KINGSEMI CO LTD
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