A silicon wafer vacuum adsorption manipulator
A vacuum adsorption and manipulator technology, applied in conveyor objects, sustainable manufacturing/processing, electrical components, etc., can solve the problems of long loading time, high breakage rate and high production cost, improve production efficiency and avoid collision damage , the effect of reducing rigid impact
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Embodiment 1
[0041] The present invention provides a silicon chip vacuum adsorption manipulator, comprising: a rotating power device 1, a mounting bracket 2, a detection device 6, a vacuum chamber 7 with a vacuum pipeline inside, and a comb-shaped vacuum adsorption finger 8;
[0042] The rotating power device 1 and the detection device 6 are fastened on the mounting bracket 2 by a fastening device;
[0043] The output shaft of the rotating power device 1 is firmly connected with the upper end surface of the vacuum chamber 7;
[0044] The detection device 6 includes several position sensors 12 that feed back position information for precisely positioning the rotational movement of the floating support 4;
[0045] The vacuum chamber 7 is provided with a pipe joint 17 communicating with the vacuum pipeline;
[0046] The comb-tooth-shaped vacuum suction finger 8 is internally provided with independent vacuum pumping pipelines that are consistent with the number of comb-tooth gaps; The upper ...
Embodiment 2
[0052] The present invention provides a vacuum adsorption manipulator for silicon wafers, comprising: a rotating power device 1, a mounting bracket 2, a rotating mechanism 3, a detection device 6, a vacuum chamber 7 with a vacuum pipeline inside, and a comb-shaped vacuum adsorption finger 8;
[0053] The rotating power device 1, the rotating mechanism 3 and the detection device 6 are fastened on the mounting bracket 2 by a fastening device;
[0054] A speed reducer 9 is fastened inside the rotating mechanism 3; the output shaft of the rotating power unit 1 realizes transmission connection with the input shaft of the speed reducer 9 through a transmission device;
[0055] The output shaft of the reducer 9 is fastened to the upper end surface of the vacuum chamber 7 through a connecting piece;
[0056] The detection device 6 includes several position sensors 12 that feed back position information for precisely positioning the rotational movement of the floating support 4;
[00...
Embodiment 3
[0062] Figure 1~4 As shown, the present invention provides a vacuum adsorption manipulator for silicon wafers comprising: a precision rotating power device 1, a mounting bracket 2, a rotating mechanism 3, a sealing cover 5, a detection device 6, a vacuum chamber 7 and a comb-shaped vacuum adsorption finger 8 ;
[0063] The precision rotating power device 1, the rotating mechanism 3 and the detection device 6 are fastened on the mounting bracket 2 by a fastening device;
[0064] A precision reducer 9 is fastened inside the rotating mechanism 3; the output shaft of the precision rotating power device 1 is connected to the input shaft of the precision reducer 9 through a transmission device;
[0065] The output shaft of the precision reducer 9 is tightly connected to the upper end surface of the sealing cover plate 5 through a connecting piece;
[0066] The detection device 6 includes several position sensors 12 that feed back position information for precisely positioning the...
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