The invention discloses a micro mass sensor based on a groove-shaped cantilever beam structure, and belongs to the technical field of sensors. In the groove-shaped cantilever beam of the sensor, one end of a fixed bock is provided with 1-2 same piezoelectric films, and a test substance adsorption film covers a cantilever end; and a resonant frequency difference delta f before and after the cantilever structure adsorbs a test substance is measured, and the mass m of the test substance is calculated further. By the introduction of the groove-shaped cantilever beam, the natural frequency of vibration and the adsorption area are increased, the sensitivity of the sensor is improved, and the measuring stability of the sensor is improved. The frequency change of the sensor caused by the mass of the adsorption film can be accurately measured through the piezoelectric films, and the mass of the test substance is calculated. The sensor has the characteristics of simple structure, large adsorption area, wide mass measuring range, high stability and sensitivity and the like, and the sensitivity can be improved by 20 percent to the maximum compared with that of a rectangular-section mass sensor with the same size particularly, so the sensor can be widely applied to measuring concentrations of gases/liquids, microparticles, dust, microbes such as bacteria or viruses and the like.