High-sensitive biochemical sensor based on resonance oscillation type micro cantilever beam structure

A biochemical sensor, micro-cantilever technology, applied in the fields of biomedicine, chemical engineering, and MEMS, can solve the problems of increasing the system volume and cost, and achieve the effect of eliminating the change of elastic constant, increasing the effective area, and reducing the volume

Active Publication Date: 2012-10-17
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

Although the commonly used optical detection has the advantage of high sensitivity, the optical components will increase the size and cost of the system

Method used

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  • High-sensitive biochemical sensor based on resonance oscillation type micro cantilever beam structure
  • High-sensitive biochemical sensor based on resonance oscillation type micro cantilever beam structure
  • High-sensitive biochemical sensor based on resonance oscillation type micro cantilever beam structure

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Embodiment Construction

[0039] In order to make the objectives, technical solutions, and advantages of the present invention clearer, the following further describes the present invention in detail in conjunction with specific embodiments and with reference to the accompanying drawings.

[0040] The invention provides a high-sensitivity biochemical sensor based on a resonant micro-cantilever beam structure, which realizes high-sensitivity and high-precision measurement of biochemical molecules by adopting a micro-cantilever beam structure with a micro-pillar structure 3, a liquid storage tank 4 and a leakage hole 5 at the front end.

[0041] Such as figure 1 As shown, figure 1 It is a schematic structural diagram of a highly sensitive biochemical sensor based on a resonant micro-cantilever beam structure according to an embodiment of the present invention, figure 2 for figure 1 Section view. The single cantilever beam sensor device includes a resonant cavity, a cantilever beam and a Whist bridge detect...

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Abstract

The invention discloses a high sensitive biochemical sensor based on a resonance oscillation type micro cantilever beam structure. The biochemical sensor comprises a resonance oscillation chamber, a cantilever beam and a Whist bridge type detection circuit, wherein a micro column structure (3), a liquid storage tank (4) and a liquid leakage hole (5) through which biochemical solution flows are etched at the free end of the cantilever beam; the support end of the cantilever beam is connected with the Whist bridge type detection circuit; the Whist bridge type detection circuit is composed four U-shaped piezoresistance bars (1), three input electrodes (8, 9, 10) and two output electrodes (7, 11); and the four piezoresistance bars (1) are connected with the input electrodes (8, 9, 10) and the output electrodes (7, 11) through a signal transmission line (2). With the adoption of the biochemical sensor, micro biochemical molecules can be sensed with a high sensitivity by detecting the frequency change after an object to be tested is absorbed; biochemical molecules with micromass can be detected; and the biochemical sensor can be widely used in engineering fields such as medicine and chemistry.

Description

Technical field [0001] The invention relates to the field of MEMS, biomedicine and chemical engineering, and in particular to a high-sensitivity biochemical sensor based on a resonant micro-cantilever beam structure. Background technique [0002] Since the 1970s, resonant sensors have developed rapidly on the basis of electronic technology, testing technology, computing technology and semiconductor integrated circuit technology. 【1】 . With the rapid development of MEMS technology, the size of resonant sensors has been reduced to the order of micrometers, submicrometers, and even nanometers. It can measure temperature, heat, magnetic field, and mass with high precision and is therefore widely used in chemical analysis. , Biological inspection, medical screening and environmental monitoring. [0003] In recent years, research on highly sensitive biochemical detection based on micro-cantilever structure has become a research hotspot 【2】 . In 2000, H.G.. Craighead of Cornell Universi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N5/02
Inventor 杨晋玲王帅鹏王晶晶杨富华
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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