Transfer robot having eight robot arms
A technology for handling robots and manipulators, which is applied in the direction of claw arms, manipulators, program-controlled manipulators, etc., and can solve problems such as the inability to use linear processes and shorten the process time
Active Publication Date: 2015-04-29
ROBOSTAR
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Problems solved by technology
[0007] Korean Laid-Open Patent Publication No. 10-2008-0047205 has the advantage of its structure that it can carry objects arranged in four directions, east, west, south, north, from all directions, but has the following disadvantages: it cannot be used because it works independently from the four directions of east, west, south, north In a linear process or a process carried out in one direction
[0009] Korean Laid-Open Patent Publication No. 10-2012-0007449 has the advantage of shortening the process time, but has the following disadvantages: it is a structure with multiple manipulators attached to one manipulator arm, so it needs to be driven at the same time, and, depending on the number of manipulators The structure is arranged at a certain interval to be able to carry multiple loads
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[0051] The structure and effects of the eight-arm transfer robot according to the present invention will be described below with reference to the accompanying drawings.
[0052] figure 1 It is a cross-sectional view of an eight-arm handling robot according to the present invention; figure 2 It is a structural diagram of the mechanical arm unit of the eight-arm handling robot according to the present invention; image 3 In order to reflect the best mechanical arm arrangement diagram of the eight-arm handling robot according to the present invention; Figure 4 It is a plan view of the eight-arm handling robot according to the present invention; Figure 5 It is a side view of the eight-arm handling robot according to the present invention.
[0053] Such as Figure 1 to Figure 5 As shown, the eight-arm handling robot (100) according to the present invention includes: a running base (110), a running slider (120), a rotating base (130), upper and lower poles (140) and a mechan...
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The present invention relates to a transfer robot having eight robot arms. According to the present invention, the eight robot arms can individually be operated and it is possible to simultaneously load or extract transfer objects (substrates or wafers) which are vertically loaded on a predetermined unit pitch. The present invention includes: a post where an arm unit is coupled to be capable of a vertical linear motion; the arm unit having first to fourth robot arm pairs which are vertically coupled on both side surfaces of the post; and the first to fourth robot arm pairs being configured to have two robot arms horizontally coupled to form a pair to provide first to eighth robot arms. Extraction, transfer, or loading for the same position is realized; thus a plurality of transfer objects can be transferred at the same time, and tact time can be shortened.
Description
technical field [0001] The invention relates to an eight-arm handling robot, in particular to an eight-arm handling robot whose eight mechanical arms can be driven separately, and can simultaneously load and take out objects (substrates or wafers, etc.) loaded up and down at a certain pitch unit. Background technique [0002] In the manufacturing process of semiconductor devices or liquid crystal displays, etc., it is necessary to carry out the process of bringing in or taking out substrates such as glass substrates used for semiconductor wafers or liquid crystal displays. [0003] Substrate processing devices (handling robots) being developed and used include dual-arm robots, handling robots composed of multiple robotic arms, etc., and usually include: a carrier holding part that holds multiple carriers; a substrate processing part that processes substrates; Between the rack holding unit and the substrate processing unit, the inversion unit stacked up and down; the indexer ...
Claims
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Login to View More IPC IPC(8): B25J9/08B25J18/00B25J18/02
CPCH01L21/67742
Inventor吴承龙徐敏硕
OwnerROBOSTAR