A device for directly measuring the pressure in a microchannel by using the deformation of the PDMS film
A micro-channel, internal pressure technology, applied in the direction of elastic deformation gauge type fluid pressure measurement, etc., can solve the problems of inaccurate pressure, complicated operation, pressure dissipation, etc., to achieve the effect of ensuring accuracy and simple operation
Inactive Publication Date: 2017-07-14
BEIJING UNIV OF TECH
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Problems solved by technology
This micro-scale effect, which is different from the macro-scale, leads to the conclusion that the solution obtained through the traditional pressure measurement method and theoretical model analysis is no longer suitable for micro-scale flow.
On the other hand, there are certain limitations in the pressure measurement methods of microfluidic systems at this stage. Most of the methods for microscale pressure measurement at this stage use pressure sensors such as laser displacement sensors and micro piezoelectric sensors outside the microfluidic system. etc., but this method also has certain disadvantages: 1. It is necessary to add a complex external pressure measuring device outside the microfluidic system, which is complicated to operate, expensive in equipment, and has a long response time; 2. It is impossible to measure the local Pressure; 3. There is pressure dissipation in the process of fluid flow transmission, resulting in inaccurate measured pressure
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[0015] How the device realizes the direct measurement of the pressure in the microchannel by using the deformation of the PDMS film will be further described in detail below in conjunction with the structural drawings.
[0016] figure 1 It is a schematic diagram of an experimental device used to directly measure the pressure in a microchannel by utilizing the deformation of a PDMS film. Very good, it is convenient for the CCD camera 6 to observe the change of the gas volume in the air groove 5), PDMS film 2 (the upper wall surface is bonded with the lower wall surface of the PDMS microchip 1 by standard UV photolithography, forming a closed air groove 5. The thickness of the film is only 50 μm to ensure that the film is very sensitive to changes in the pressure in the microchannel, even if the pressure changes slightly, the film can be deformed accordingly), the main channel 3 (engraved at the center of the upper wall of the glass chip 4, and the air The groove 5 is in the sa...
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A device for directly measuring the pressure in a microchannel by using the deformation of the PDMS film. The PDMS chip with grooves is separated from the main channel by a thin layer of polydimethylsiloxane (PDMS) membrane, so that the grooves are airtight and the grooves The pressure of the gas in the groove is known (standard atmospheric pressure). When the fluid in the main channel passes through the groove, the PDMS film will deform, resulting in a change in the volume of the gas in the groove. By measuring the volume of the gas in the groove, it can be quickly and accurately Get the pressure in the main channel at this position. The novelty of the invention lies in the design of a new device for measuring the pressure in the microchannel. The size of the micro-grooves and micro-channels can be designed to meet different measurement pressure ranges.
Description
technical field [0001] The invention relates to a method for directly measuring the pressure in a microchannel, in particular to a microfluidic chip on a microscopic scale in fluid mechanics to realize the measurement and control of the pressure in a microchannel. The invention belongs to the technical field of a method for directly measuring the internal pressure of a microchannel by using an experimental device. Background technique [0002] With the rapid development of large-scale and ultra-large-scale integrated circuits, research on microelectromechanical systems (MEMS) has been more widely used. As an important branch of MEMS, microfluidic control system has attracted much attention for its highly integrated functions and huge potential applications. Micro-scale flow is the basis for the study of micro-fluidic systems. As an important parameter of micro-scale flow-the pressure in the micro-channel will directly affect the flow characteristics of the fluid at the micr...
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IPC IPC(8): G01L7/08
Inventor 申峰肖鹏李易刘赵淼
Owner BEIJING UNIV OF TECH