Device for directly measuring pressure inside micro-channel by the aid of deformation of PDMS (polydimethylsiloxane) film
A technology of micro-channel and internal pressure, applied in the direction of fluid pressure measurement of elastic deformation gauge, can solve the problems of complicated operation, inaccurate pressure, long response time, etc., and achieve the effect of simple operation and guaranteed accuracy
Inactive Publication Date: 2015-04-29
BEIJING UNIV OF TECH
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Problems solved by technology
This micro-scale effect, which is different from the macro-scale, leads to the conclusion that the solution obtained through the traditional pressure measurement method and theoretical model analysis is no longer suitable for micro-scale flow.
On the other hand, there are certain limitations in the pressure measurement methods of microfluidic systems at this stage. Most of the methods for microscale pressure measurement at this stage use pressure sensors such as laser displacement sensors and micro piezoelectric sensors outside the microfluidic system. etc., but this method also has certain disadvantages: 1. It is necessary to add a complex external pressure measuring device outside the microfluidic system, which is complicated to operate, expensive in equipment, and has a long response time; 2. It is impossible to measure the local Pressure; 3. There is pressure dissipation in the process of fluid flow transmission, resulting in inaccurate measured pressure
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[0015] How the device realizes the direct measurement of the pressure in the microchannel by using the deformation of the PDMS film will be further described in detail below in conjunction with the structural drawings.
[0016] figure 1 It is a schematic diagram of an experimental device used to directly measure the pressure in a microchannel by utilizing the deformation of a PDMS film. Very good, it is convenient for the CCD camera 6 to observe the change of the gas volume in the air groove 5), PDMS film 2 (the upper wall surface is bonded with the lower wall surface of the PDMS microchip 1 by standard UV photolithography, forming a closed air groove 5. The thickness of the film is only 50 μm, which can ensure that the film is very sensitive to the change of the pressure in the microchannel, even if the pressure changes slightly, the film can produce corresponding deformation), the main channel 3 (engraved at the center of the upper wall of the glass chip 4, and the air The ...
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The invention discloses a device for directly measuring pressure inside a micro-channel by the aid of deformation of a PDMS (polydimethylsiloxane) film. A PDMS chip with a groove is separated from a main channel by the aid of a layer of especially thin PDMS film, thus, the groove is airtight, the pressure of a gas in the groove is known (standard atmospheric pressure), when a fluid in the main channel passes through the groove, the PDMS film can deform, the volume of the gas in the groove changes, and the pressure inside the main channel in the position can be acquired rapidly and accurately by measuring the volume of the gas in the groove. The device is characterized in that a new device for measuring the pressure inside the micro-channel is designed. Sizes of both the micro-groove and the micro-channel can be designed voluntarily, and different pressure measurement ranges can be satisfied.
Description
technical field [0001] The invention relates to a method for directly measuring the pressure in a microchannel, in particular to a microfluidic chip on a microscopic scale in fluid mechanics to realize the measurement and control of the pressure in a microchannel. The invention belongs to the technical field of a method for directly measuring the internal pressure of a microchannel by using an experimental device. Background technique [0002] With the rapid development of large-scale and ultra-large-scale integrated circuits, research on microelectromechanical systems (MEMS) has been more widely used. As an important branch of MEMS, microfluidic control system has attracted much attention for its highly integrated functions and huge potential applications. Micro-scale flow is the basis for the study of micro-fluidic systems. As an important parameter of micro-scale flow-the pressure in the micro-channel will directly affect the flow characteristics of the fluid at the micr...
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Inventor 申峰肖鹏李易刘赵淼
Owner BEIJING UNIV OF TECH