7600 nm long-wave pass infrared filtering sensitive element
A sensitive element, 137nm technology, applied in the field of infrared filter sensitive elements, it can solve the problems of poor precision and low signal-to-noise ratio, and achieve the effect of improving the signal-to-noise ratio and improving the test accuracy.
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[0014] Such as figure 1 with figure 2 As shown, a kind of 7600nm long-wave pass infrared filter sensitive element described in this embodiment includes a substrate 2 with Ge as raw material, Ge and ZnS as the first coating layer 1 and Ge and ZnS as the second coating layer 3, And the substrate 2 is arranged between the first coating layer 1 and the second coating layer 3, and the first coating layer 1 is arranged sequentially from inside to outside including a Ge layer with a thickness of 165nm, a ZnS layer with a thickness of 237nm, and a ZnS layer with a thickness of 223nm. Ge layer, 411nm thick ZnS layer, 137nm thick Ge layer, 338nm thick ZnS layer, 137nm thick Ge layer, 254nm thick ZnS layer, 171nm thick Ge layer, 263nm thick ZnS layer, 157nm thick Ge layer , 499nm thick ZnS layer, 141nm thick Ge layer, 247nm thick ZnS layer, 125nm thick Ge layer, 273nm thick ZnS layer, 391nm thick Ge layer, 178nm thick ZnS layer, 166nm thick Ge layer, 487nm thick Thick ZnS layer, 131nm...
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