Substrate supporting needle, substrate supporting device and substrate picking and placing system

A support device and support needle technology, which is applied in the direction of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as substrate scratches, and achieve the effects of reducing scratches, reducing production costs, and reducing damage

Active Publication Date: 2015-05-27
HEFEI BOE OPTOELECTRONICS TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, relative displacement may occur between the substrate supporting pin and the substrate, and the top of the substrate supporting pin in the prior art is sharp (such as figure 1 As shown), the tip of the substrate support needle is easy to scratch the substrate

Method used

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  • Substrate supporting needle, substrate supporting device and substrate picking and placing system
  • Substrate supporting needle, substrate supporting device and substrate picking and placing system
  • Substrate supporting needle, substrate supporting device and substrate picking and placing system

Examples

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Embodiment Construction

[0029] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.

[0030] As an aspect of the present invention, there is provided a substrate supporting needle for supporting a substrate, such as figure 2 and image 3 As shown, the substrate supporting pin 10 includes a rod body 11, and a rotating part is provided at the supporting end of the rod body 11, and the rotating part can roll along the surface of the substrate.

[0031] When a relative displacement occurs between the substrate and the substrate support pins 10 (such as aligning the substrate), the rotating member can roll along the surface of the substrate, thus causing rolling friction between the substrate and the substrate support pins, thereby reducing the Scr...

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PUM

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Abstract

The invention provides a substrate supporting needle, a substrate supporting device and a substrate picking and placing system, wherein the substrate supporting needle is used for supporting a substrate and comprises a rod body; and a rotating piece is arranged at the supporting end of the rod body and can roll along the surface of the substrate. Compared with the prior art, the substrate supporting needle, the substrate supporting device and the substrate picking and placing system have the advantage that the damage to the substrate can be reduced.

Description

technical field [0001] The invention relates to the field of preparation of display devices, in particular to a substrate support needle, a substrate support device including the substrate support needle, and a substrate pick-and-place system including the substrate support device. Background technique [0002] During the manufacturing process of the display device, the substrate is placed on a supporting table of a supporting device, such as a base or a transfer table. When picking and placing the substrate, the substrate support needle passes through the support table to lift the substrate, and the manipulator can pick and place the substrate; when the substrate support needle descends, the substrate falls on the support table. However, relative displacement may occur between the substrate supporting pin and the substrate, and the tip of the substrate supporting pin in the prior art is sharp (such as figure 1 As shown), the tip of the substrate support needle is easy to s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/687H01L21/68H01L21/683
CPCH01L21/68742H01L21/68H01L21/6838H01L21/6875
Inventor 王小军石旭徐志龙刘大刚李冬青许建凡
Owner HEFEI BOE OPTOELECTRONICS TECH
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