Sputtering thin film type pore water pressure sensor
A technology of pore water pressure and sputtering thin film, which is applied in the field of sensors, can solve the problems of large influence of human factors, difficulty in mass production, and low yield of products, and achieve the effects of eliminating instability, shortening production cycle, and firm and reliable sealing
Inactive Publication Date: 2015-07-08
GENERAL ENG RES INST CHINA ACAD OF ENG PHYSICS
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Problems solved by technology
[0007] 3) Manual single bonding production, which is greatly affected by human factors and has poor consistency;
[0008] 4) This structure and production process can only be produced alone, and it is not easy to produce in batches, the production efficiency is low, and the yield of the product is low;
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[0027] The present invention will be further described below in conjunction with accompanying drawing:
[0028] Such as figure 1 , figure 2 , image 3 , Figure 4 with Figure 5 As shown, the present invention includes a gold wire lead 5, a signal wire 7, an elastic sensitive element 1 and an annular thin-walled cylinder 2 with a sealing cover 8, and the annular thin-walled cylinder 2 is arranged on the upper surface of the elastic sensitive element 1 , the lower surface of the elastic sensitive element 1 is provided with a water-permeable circular membrane 9, the elastic sensitive element 1, the sealing cover 8 and the annular thin-walled cylinder form a sealed cavity 11, and the sealed cavity 11 is provided with a sputtered metal film 4 and a transfer Plate 3, the sputtered metal film 4 is located on the upper surface of the elastic sensitive element 1, the adapter plate 3 is located above the sputtered metal film 4, and the signal wire 7 penetrates the sealed cavity 11...
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Abstract
The invention discloses a sputtering thin film type pore water pressure sensor. The sputtering thin film type pore water pressure sensor comprises a golden line leading wire, a signal guide wire, an elastic sensitive element and a ring-shaped thin film cylinder with a seal cover, wherein the ring-shaped thin film cylinder is arranged on the upper surface of the elastic sensitive element, the lower surface of the elastic sensitive element is provided with a water permeable circular film, a sealing cavity is formed by the elastic sensitive element, the seal cover and the ring-shaped thin film cylinder, the sealing cavity is internally provided with a sputtering metal thin film and a conversion board, the signal guide wire penetrates into the sealing cavity from the side wall of the ring-shaped thin film cylinder, and a signal outgoing wire of the signal guide wire is connected with the sputtering metal thin film through the golden line leading wire. By means of the sputtering thin film type pore water pressure sensor, the reliability of the sensor is improved, the machining of pressure sensitive circular films are easy to achieve batch machining, batch production of pressure sensitive elements can be achieved, the production period is shortened, the machining cost is lowered, the production efficiency is improved, the leakage and drop likely to occur to sealing glue after working underwater for a long time are solved, and the sealing is firm and reliable.
Description
technical field [0001] The invention relates to a sensor, in particular to a sputtering film type pore water pressure sensor. Background technique [0002] In the current era of frequent earthquakes, earthquake liquefaction is one of the important causes of earthquake disasters. Earthquake liquefaction is usually accompanied by earthquake damage phenomena such as large-scale ground subsidence deformation, ground fissure slip, water jet sand emission, and house subsidence. The researchers found that when the above-mentioned macroscopic liquefaction occurs, the excess pore water pressure of the sand layer is equal to the effective covering pressure, that is, the excess pore pressure ratio μ / σ′ is equal to 1.0. However, recent studies have shown that when the pore pressure ratio is less than 1.0, that is, 0.6 to 0.7, the soil layer begins to move against the ground, and the ground cracks, slippage, and house subsidence are affected, and the so-called liquefaction phenomenon ma...
Claims
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IPC IPC(8): G01L7/08
Inventor 黎启胜唐俐胡绍全刘伟王小龙时海亮胡东平王远李代生曾永菊朱昌亚
Owner GENERAL ENG RES INST CHINA ACAD OF ENG PHYSICS