Gas concentration sensor with a suspended structure
A concentration sensor and concentration technology, used in instruments, scientific instruments, chemical instruments and methods, etc., can solve problems such as interference measurement, and achieve reliable measurement values and high resolution.
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[0042] A gas concentration sensor according to the invention is used to measure the concentration of at least one gas analyte mixed with a carrier gas. The concentrations mentioned in the description below are thus the concentrations of the analytes.
[0043] In the following description, phase shift refers to the phase shift between the response signal or output signal and the excitation signal. The response signal, also called the output signal, is the change in temperature of the suspension, which is obtained by measuring the change in the resistance of the suspension, which is obtained by measuring the change in voltage at the terminals of the suspension .
[0044] exist figure 1 An exemplary measuring device according to the invention can be seen in , comprising a suspension structure 2 at its two longitudinal ends with respect to a support 4 . In the example shown, the suspension structure is formed by nanowires 2 anchored to the support using fixing pads 3 forming co...
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