The invention belongs to the technical field of electronic components, and discloses a
nitrogen dioxide gas sensor based on a flower-shaped SnSe2 / SnO2
heterojunction, and a preparation technology andapplication of the
nitrogen dioxide gas sensor. The
nitrogen dioxide gas sensor comprises a gas sensitive material and an interdigital
electrode plate, and the surface of the interdigital
electrode plate is coated with the gas sensitive material, wherein the
coating thickness is 1-100 [mu]m; and the gas sensitive material is a flower-shaped SnSe2 / SnO2 nano-material. The flower-shaped nano
heterojunction is obtained through a hydrothermal method and a
thermal oxidation method, raw materials are convenient to obtain, low in cost and simple in preparation process, equipment investment is small, and the process flow is simple. The
nitrogen dioxide sensor made of the flower-shaped SnSe2 / SnO2 nano-material selects a
silicon substrate, the material and
silicon-based
microelectronics are integrated, and the micro
hot plate type
nitrogen dioxide gas sensor having the advantages of low
heating power consumption, small heat loss, short heat
response time, compatibility with a
CMOS process, easy integration with other microelectronic devices and the like is prepared.