A two-dimensional force-measuring spindle fixture based on psd principle
A spindle and principle technology, applied in the direction of manufacturing tools, measuring/indicating equipment, metal processing machinery parts, etc., can solve the problems of dependence, difficult real-time online feedback, etc., and achieve good alignment, simple structure, and good monochromaticity Effect
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[0015] Specific implementation mode 1: Combination figure 1 with figure 2 As shown, it includes a flexible spindle base 1, a follower reflecting plane mirror 2, a fixed reflecting plane mirror 3, a semiconductor laser 4, and a one-dimensional PSD position sensor 5;
[0016] The flexible spindle base 1 is composed of an upper fixed plate 1-1 connected to a lower fixed shaft plate 1-3 through a plurality of flexible columns 1-2, and the fixed shaft plate 1-3 is provided with a shaft to be detected. The fixed shaft hole 1-4 of 6; the follower mirror 2 is inlaid on the right end surface of a flexible column 1-2 on the right side of the flexible spindle base 1. When the detected shaft 6 is subjected to external force, due to multiple bending The rigidity value of the flexible column 1-2 is low. The detected axis 6 can drive the fixed axis plate 1-3 to swing, and the fixed axis plate 1-3 will drive multiple flexible columns 1-2 to swing, and also drive the flexible spindle seat 1 to t...
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